Emerging trends in surface metrology

PM Lonardo, DA Lucca, L De Chiffre - Cirp Annals, 2002‏ - Elsevier
Recent advancements and some emerging trends in the methods and instruments used for
surface and near surface characterisation are presented, considering the measurement of …

[ספר][B] Scanning probe microscopy: the lab on a tip

E Meyer, R Bennewitz, HJ Hug - 2021‏ - Springer
Written by three leading experts in the field, this book describes and explains all essential
aspects of scanning probe microscopy. Emphasis is placed on the experimental design and …

Two-dimensional map** of the electrostatic potential in transistors by electron holography

WD Rau, P Schwander, FH Baumann, W Höppner… - Physical Review Letters, 1999‏ - APS
We demonstrate the first successful map** of the two-dimensional electrostatic potential in
semiconductor transistor structures by electron holography. Our high resolution 2D phase …

Secondary electron imaging as a two-dimensional dopant profiling technique: Review and update

D Venables, H Jain, DC Collins - … of Vacuum Science & Technology B …, 1998‏ - pubs.aip.org
Secondary electron (SE) imaging of semiconductors reveals contrast between n-and p-type
areas that can serve as the basis for a two-dimensional dopant profiling technique. In this …

Ionic and electronic impedance imaging using atomic force microscopy

R O'Hayre, M Lee, FB Prinz - Journal of applied physics, 2004‏ - pubs.aip.org
Localized alternating current (ac) impedance measurements are acquired directly through a
conductive atomic force microscope (AFM) tip. Both a spectroscopy mode (where full …

Quantitative impedance measurement using atomic force microscopy

R O'Hayre, G Feng, WD Nix, FB Prinz - Journal of applied physics, 2004‏ - pubs.aip.org
Obtaining quantitative electrical information with scanning probe microscopy techniques
poses a significant challenge since the nature of the probe/sample contact is frequently …

Cross-sectional nano-spreading resistance profiling

P De Wolf, T Clarysse, W Vandervorst… - Journal of Vacuum …, 1998‏ - pubs.aip.org
The nano-spreading resistance profiling (nano-SRP) method has been developed and
improved such that it can now be used as an accurate tool for quantitative two-dimensional …

Quantitative analysis of one-dimensional dopant profile by electron holography

MR McCartney, MA Gribelyuk, J Li, P Ronsheim… - Applied physics …, 2002‏ - pubs.aip.org
The one-dimensional dopant profile of a silicon p–n junction was characterized using off-
axis electron holography in a transmission electron microscope (TEM). Quantitative …

Advances in experimental technique for quantitative two-dimensional dopant profiling by scanning capacitance microscopy

VV Zavyalov, JS McMurray, CC Williams - Review of scientific …, 1999‏ - pubs.aip.org
Several advances have been made toward the achievement of quantitative two-dimensional
dopant and carrier profiling. To improve the dielectric and charge properties of the oxide …

Quantitative measurement of nanoscale electrostatic potentials and charges using off-axis electron holography: Developments and opportunities

MR McCartney, RE Dunin-Borkowski, DJ Smith - Ultramicroscopy, 2019‏ - Elsevier
Off-axis electron holography has evolved into a powerful electron-microscopy-based
technique for characterizing electromagnetic fields with nanometer-scale resolution. In this …