Atomic layer deposition (ALD) for high‐quality conformal inorganic thin films is one of the
cornerstones of modern microelectronics, while molecular layer deposition (MLD) is its less …

The deposition rate and properties of MLD films are for a large part determined by what
happens during the reactant exposure step. In some cases, however, the purge step is of …

Molecular layer deposition (MLD) offers the deposition of ultrathin and conformal organic or
hybrid films which have a wide range of applications. However, some critical potential …

Atomic/molecular layer deposited (ALD/MLD) inorganic–organic thin films form a novel class
of materials with tunable properties. In selected cases, hybrid materials are reported to show …

Many applications, such as those in energy, digital, and medical technologies, are driving
the development of new materials. Recently studied materials such as hybrid metal organic …

Titanicone, obtained through molecular layer deposition (MLD) using TiCl4 and ethylene
glycol (EG), is often regarded as a thin film of titanium ethylene glycolate [Ti (OCH2CH2O) …

Molecular layer deposition (MLD) is a strongly emerging thin-film technique for deposition of
ultra-thin inorganic–organic hybrid (“metalcone”) coatings directly from the gas phase, even …

Hybrid molecular layer deposition (MLD) has significant potential for the creation of ultrathin
electrochemically active materials, due to its ability to combine organic and inorganic …

Molecular layer deposition (MLD) of ethylene glycol‐alucone (EG‐alucone) on the Nafion
cation exchange membrane is investigated to understand its impact on the morphology of …

We report on the substantial influence of methanol presence on the dissolution mechanism
of Ge 20 Sb 5 S 75 bulk glass with subsequent superior properties of thin films deposited …