Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …

Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

Precise actuation is a widely utilized technology in the realm of high-end equipment.
Piezoelectric actuators (PEAs) stand out due to their exceptional attributes, including high …

This paper presents a new approach for hysteresis identification and compensation of
piezoelectric actuators by resorting to an intelligent hysteresis model. In particular, a least …

Nanopositioning is a key enabling technology for imaging, manipulation, measurement and
fabrication of matters at the nanoscale. Positioners driven by piezoelectric actuators are …

In the atomic force microscope (AFM) scanning system, the piezoscanner is significant in
realizing high-performance tasks. To cater to this demand, a novel compliant two-degrees-of …

This paper presents the mechanical design, computational optimization, and
experimentation of a decoupled 2-DOF monolithic mechanism. In the mechanical design …

The limited degrees of freedom (DOFs) of servo motions is an inherent deficiency in
conventional, fast-tool-servo-(FTS)-assisted, diamond-turning, highly blocking applications …

This paper presents a new bridge-type compliant displacement amplifier embedded with
Scott-Russell mechanism. Based on this design, a novel compliant XY micro-positioning …

Piezodriven flexure-based motion stages, with a large workspace and high positioning
precision, are really attractive for the realization of high-performance atomic force …