Any axis of precision machines possesses six-degree-of-freedom (6-DOF) motion errors,
also called the geometric errors, due to manufacturing tolerances and assembly errors …

A simple method for simultaneously measuring the 6DOF geometric motion errors of the
linear guide was proposed. The mechanisms for measuring straightness and angular errors …

A novel method for simultaneously measuring six degree-of-freedom (6DOF) geometric
motion errors is proposed in this paper, and the corresponding measurement instrument is …

A laser homodyne straightness interferometer with simultaneous measurement of six
degrees of freedom motion errors is proposed for precision linear stage metrology. In this …

In this study, a novel and simple measurement system for simultaneously measuring the
geometric errors in six-degree-of-freedom (6-DOF) for a moving linear stage of a machine …

A compact, fiber-coupled, six degree-of-freedom measurement system which enables fast,
accurate calibration, and error map** of precision linear stages is presented. The novel …

The rotary axis is the basis for rotational motion. Its motion errors have critical effects on the
accuracy of the related equipment, such as a five-axis computer numerical control machine …

A novel method for small angular displacement measurement based on an autocollimator
and a common-path compensation principle by using single CCD detector was proposed …

A simple and novel method for measuring four-degree-of-freedom geometric errors of a
linear stage was put forward. A single-mode fiber-coupled laser module was used. Only a …

This paper presents a set of formulae for estimating the light spot position projected on a
quadrant detector (QD). A novel method of annular segmentation calculus (ASC) is …