Abstract System inversion is at the basis of many feedforward and learning control
algorithms. The aim of this paper is to analyze several of these approaches in view of their …

Manufacturing equipment and scientific instruments, including wafer scanners, printers,
microscopes, and medical imaging scanners, require accurate and fast motions. An increase …

Technology in a broad sense is driven by developments in semiconductor technology,
particularly with respect to the computational power of devices and systems, as well as …

Fault diagnosis systems are essential in precision mechatronics to facilitate maintenance
and to minimize downtime. The aim of this paper is to describe the current trend in control for …

Iterative learning control (ILC) enables high performance for systems that execute repeating
tasks. Norm-optimal ILC based on lifted system representations provides an analytic …

Increasingly stringent performance requirements for motion control necessitate the use of
increasingly detailed models of the system behavior. Motion systems inherently move …

Frequency response function (FRF) identification is often used as a basis for control systems
design and as a starting point for subsequent parametric system identification. The aim of …

Performance requirements in precision motion systems, including those used in integrated
circuit manufacturing and printing systems, are ever increasing. For instance, internal …

This article describes a method for the active control of the deformations on a magnetically
levitated moving-magnet planar motor. The planar motor under consideration is comprised …

This paper aims to introduce a new approach to optimize the tunable controller parameters
of linear parameterizable controllers. The presented approach is frequency‐domain based …