XPS depth profiling of nano-layers by a novel trial-and-error evaluation procedure
In spite of its superior chemical sensitivity, XPS depth profiling is rarely used because of the
alteration introduced by the sputter removal process and the resulting inhomogeneous in …
alteration introduced by the sputter removal process and the resulting inhomogeneous in …
Modeling of high power impulse magnetron sputtering discharges with tungsten target
The ionization region model (IRM) is applied to model a high power impulse magnetron
sputtering discharge with a tungsten target. The IRM gives the temporal variation of the …
sputtering discharge with a tungsten target. The IRM gives the temporal variation of the …
Investigation of the wear and corrosion behaviors of CrN films onto oxynitriding-treated AISI H13 alloy steel by the direct current magnetron sputtering process
SH Chang, BC Tsai, KT Huang, CH Yang - Thin Solid Films, 2022 - Elsevier
In the research reported herein, CrN films were coated onto oxynitriding-treated AISI H13
alloy steel using direct current magnetron sputtering deposition technique. The AISI H13 …
alloy steel using direct current magnetron sputtering deposition technique. The AISI H13 …
Link between plasma properties with morphological, structural and mechanical properties of thin Ti films deposited by high power impulse magnetron sputtering
The main focus of this work is to correlate the basic plasma properties with morphological,
structural and mechanical properties of thin films to bridge the gap between the energy …
structural and mechanical properties of thin films to bridge the gap between the energy …
Optical properties and stability of copper thin films for transparent thermal heat reflectors
The use of thin metallic layers at the thickness limit where transparency or spectral selectivity
are achieved is gaining increased interest. The use of cheap and abundant materials is …
are achieved is gaining increased interest. The use of cheap and abundant materials is …
High power impulse magnetron sputtering of tungsten: a comparison of experimental and modelling results
Here, we compare the ionization region model (IRM) against experimental measurements of
particle densities and electron temperature in a high power impulse magnetron sputtering …
particle densities and electron temperature in a high power impulse magnetron sputtering …
Influence of HiPIMS Pulse Widths on the Structure and Properties of Copper Films
X Liu, H Bai, Y Ren, J Li, X Liu - Materials, 2024 - mdpi.com
High-power pulse magnetron sputtering is a new type of magnetron sputtering technology
that has advantages such as high peak power density and a high ionization rate compared …
that has advantages such as high peak power density and a high ionization rate compared …
Wear and Corrosion Resistance of CrN Films on Oxynitriding-treated Vanadis 8 Tool Steel via the DC Magnetron Sputtering Process
SH Chang, MH Yu, KT Huang - ISIJ International, 2022 - jstage.jst.go.jp
This research coated CrN films on oxynitriding-treated Vanadis 8 tool steel using the DC
magnetron sputtering process of the PVD technique. The experimental parameters include …
magnetron sputtering process of the PVD technique. The experimental parameters include …
Structure, phase evolution and properties of Ta films deposited using hybrid high-power pulsed and DC magnetron co-sputtering
M Huang, YS Liu, ZB He, Y Yi - Chinese Physics B, 2022 - iopscience.iop.org
Crystalline phase and microstructure control are critical for obtaining desired properties of
Ta films deposited by magnetron sputtering. Structure, phase evolution and properties of Ta …
Ta films deposited by magnetron sputtering. Structure, phase evolution and properties of Ta …
Improvement of the Wear Resistance and Corrosion Properties of CrN Films on Oxynitriding-Treated Vanadis 23 High-Speed Steel by the DC Magnetron Sputtering …
SH Chang, WY Shiao, KT Huang - Materials Transactions, 2023 - jstage.jst.go.jp
This study coated CrN films onto oxynitriding-treated Vanadis 23 high-speed steel using the
DC magnetron sputtering process of the PVD technique. The experimental parameters …
DC magnetron sputtering process of the PVD technique. The experimental parameters …