XPS depth profiling of nano-layers by a novel trial-and-error evaluation procedure

AS Racz, M Menyhard - Scientific Reports, 2024 - nature.com
In spite of its superior chemical sensitivity, XPS depth profiling is rarely used because of the
alteration introduced by the sputter removal process and the resulting inhomogeneous in …

Modeling of high power impulse magnetron sputtering discharges with tungsten target

SS Babu, M Rudolph, D Lundin… - Plasma Sources …, 2022 - iopscience.iop.org
The ionization region model (IRM) is applied to model a high power impulse magnetron
sputtering discharge with a tungsten target. The IRM gives the temporal variation of the …

Investigation of the wear and corrosion behaviors of CrN films onto oxynitriding-treated AISI H13 alloy steel by the direct current magnetron sputtering process

SH Chang, BC Tsai, KT Huang, CH Yang - Thin Solid Films, 2022 - Elsevier
In the research reported herein, CrN films were coated onto oxynitriding-treated AISI H13
alloy steel using direct current magnetron sputtering deposition technique. The AISI H13 …

Link between plasma properties with morphological, structural and mechanical properties of thin Ti films deposited by high power impulse magnetron sputtering

P Moskovkin, C Maszl, R Schierholz… - Surface and Coatings …, 2021 - Elsevier
The main focus of this work is to correlate the basic plasma properties with morphological,
structural and mechanical properties of thin films to bridge the gap between the energy …

Optical properties and stability of copper thin films for transparent thermal heat reflectors

I Pana, AC Parau, M Dinu, AE Kiss, LR Constantin… - Metals, 2022 - mdpi.com
The use of thin metallic layers at the thickness limit where transparency or spectral selectivity
are achieved is gaining increased interest. The use of cheap and abundant materials is …

High power impulse magnetron sputtering of tungsten: a comparison of experimental and modelling results

SS Babu, M Rudolph, PJ Ryan, J Fischer… - Plasma Sources …, 2023 - iopscience.iop.org
Here, we compare the ionization region model (IRM) against experimental measurements of
particle densities and electron temperature in a high power impulse magnetron sputtering …

Influence of HiPIMS Pulse Widths on the Structure and Properties of Copper Films

X Liu, H Bai, Y Ren, J Li, X Liu - Materials, 2024 - mdpi.com
High-power pulse magnetron sputtering is a new type of magnetron sputtering technology
that has advantages such as high peak power density and a high ionization rate compared …

Wear and Corrosion Resistance of CrN Films on Oxynitriding-treated Vanadis 8 Tool Steel via the DC Magnetron Sputtering Process

SH Chang, MH Yu, KT Huang - ISIJ International, 2022 - jstage.jst.go.jp
This research coated CrN films on oxynitriding-treated Vanadis 8 tool steel using the DC
magnetron sputtering process of the PVD technique. The experimental parameters include …

Structure, phase evolution and properties of Ta films deposited using hybrid high-power pulsed and DC magnetron co-sputtering

M Huang, YS Liu, ZB He, Y Yi - Chinese Physics B, 2022 - iopscience.iop.org
Crystalline phase and microstructure control are critical for obtaining desired properties of
Ta films deposited by magnetron sputtering. Structure, phase evolution and properties of Ta …

Improvement of the Wear Resistance and Corrosion Properties of CrN Films on Oxynitriding-Treated Vanadis 23 High-Speed Steel by the DC Magnetron Sputtering …

SH Chang, WY Shiao, KT Huang - Materials Transactions, 2023 - jstage.jst.go.jp
This study coated CrN films onto oxynitriding-treated Vanadis 23 high-speed steel using the
DC magnetron sputtering process of the PVD technique. The experimental parameters …