Roadmap for optical metasurfaces

AI Kuznetsov, ML Brongersma, J Yao, MK Chen… - ACS …, 2024 - ACS Publications
Metasurfaces have recently risen to prominence in optical research, providing unique
functionalities that can be used for imaging, beam forming, holography, polarimetry, and …

Sub-10 nm fabrication: methods and applications

Y Chen, Z Shu, S Zhang, P Zeng, H Liang… - … Journal of Extreme …, 2021 - iopscience.iop.org
Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance
for advancing nanoscience and nanotechnology. While the capability of current …

Light to shape the future: from photolithography to 4D printing

J del Barrio… - Advanced Optical Materials, 2019 - Wiley Online Library
Over the last few decades, the demand of polymeric structures with well‐defined features of
different size, dimension, and functionality has increased from various application areas …

Nanoimprint lithography for high-throughput fabrication of metasurfaces

DK Oh, T Lee, B Ko, T Badloe, JG Ok, J Rho - Frontiers of Optoelectronics, 2021 - Springer
Metasurfaces are composed of periodic sub-wavelength nanostructures and exhibit optical
properties that are not found in nature. They have been widely investigated for optical …

Synthesis, assembly, optical properties, and sensing applications of plasmonic gap nanostructures

JM Kim, C Lee, Y Lee, J Lee, SJ Park… - Advanced …, 2021 - Wiley Online Library
Plasmonic gap nanostructures (PGNs) have been extensively investigated mainly because
of their strongly enhanced optical responses, which stem from the high intensity of the …

Top-down fabrication of shape-controlled, monodisperse nanoparticles for biomedical applications

X Fu, J Cai, X Zhang, WD Li, H Ge, Y Hu - Advanced drug delivery reviews, 2018 - Elsevier
Nanoparticles for biomedical applications are generally formed by bottom-up approaches
such as self-assembly, emulsification and precipitation. But these methods usually have …

Nanoimprint lithography

SY Chou, PR Krauss, PJ Renstrom - Journal of Vacuum Science & …, 1996 - pubs.aip.org
Nanoimprint lithography, a high‐throughput, low‐cost, nonconventional lithographic method
proposed and demonstrated recently, has been developed and investigated further …

Nanoimprint lithography: methods and material requirements

LJ Guo - Advanced materials, 2007 - Wiley Online Library
Nanoimprint lithography (NIL) is a nonconventional lithographic technique for high‐
throughput patterning of polymer nanostructures at great precision and at low costs. Unlike …

New approaches to nanofabrication: molding, printing, and other techniques

BD Gates, Q Xu, M Stewart, D Ryan, CG Willson… - Chemical …, 2005 - ACS Publications
“Nanofabrication” is the process of making functional structures with arbitrary patterns
having minimum dimensions currently defined (more-or-less arbitrarily) to be e100 nm …

Block copolymer nanopatterning for nonsemiconductor device applications

GG Yang, HJ Choi, KH Han, JH Kim… - … Applied Materials & …, 2022 - ACS Publications
Block copolymer (BCP) nanopatterning has emerged as a versatile nanoscale fabrication
tool for semiconductor devices and other applications, because of its ability to organize well …