Accurate pattern transfer in wafer scanners necessitates the wafer stage and the reticle
stage executing a coordinated motion with the synchronization error in terms of nanometers …

Manufacturing equipment and scientific instruments, including wafer scanners, printers,
microscopes, and medical imaging scanners, require accurate and fast motions. An increase …

Accurate pattern transfer, coupled with stringent requirements for throughput and quality in
lithography systems, necessitates the wafer scanner to execute an aggressive motion with …

Technology in a broad sense is driven by developments in semiconductor technology,
particularly with respect to the computational power of devices and systems, as well as …

In the realm of ultraprecision motion control, achieving high tracking accuracy, great
trajectory generalization, and robust disturbance rejection simultaneously remains a …

To meet the increasing demand for denser integrated circuits, feedforward control plays an
important role in the achievement of high servo performance of wafer stages. The …

Abstract Models of inverse systems are commonly encountered in control, eg, feedforward.
The aim of this paper is to address several aspects in identification of inverse models …

The increasing demand on precision and throughput within high-precision mechatronics
industries requires a new generation of feedforward controllers with higher accuracy than …

We present a control scheme for video-rate atomic force microscopy with rosette pattern. The
controller structure involves a feedback internal-model-based controller and a feedforward …

Ever–increasing throughput specifications in semiconductor manufacturing require
operating high–precision mechatronics, such as linear motors, at higher accelerations. In …