US10979025B2 - 5G band n79 acoustic wave resonator RF filter circuit - Google Patents
US10979025B2 - 5G band n79 acoustic wave resonator RF filter circuit - Google Patents 5G …

(57) ABSTRACT A method of wafer scale packaging acoustic resonator devices and an
apparatus therefor. The method including providing a partially completed semiconductor …

Since FBAR (free-standing bulk acoustic resonator) and solidly mounted resonator SMR-
BAW devices came onto the scene as serious competition to the entrenched SAW …

Thin layers of high quality Single-crystal piezoelectric material, high temperature Sintered
piezoelectric material, or high quality thin film grown material are transferred to an …

Disclosed is an acoustic resonator that includes a substrate, a? rst electrode, a layer of
piezoelectric material, a second electrode, and an alternating frame region. The? rst elec …

(57) ABSTRACT A duplexer includes a transmission filter and a reception filter having
different passbands, wherein: first resonators that are series resonators or parallel …

US7332985B2 - Cavity-less film bulk acoustic resonator (FBAR) devices - Google Patents
US7332985B2 - Cavity-less film bulk acoustic resonator (FBAR) devices - Google Patents …

4,798,990 4,819,215 4,836,882 4,841,429 4,906,840 5,048,036 5,048,038 5,066,925
5,075,641 5,111,157 5,118,982 5,129,132 5,162,691 5,166,646 5,185.589 5,214,392 …

6,462,631 B2 10/2002 Bradley et al. 4,355,408 A 10/1982 Scarrott 6,466,105 B1 10/2002
Loblet al. 4,456,850 A 6, 1984 Inoue et al.................. 310,324 6,466,418 B1 10/2002 Horng et …

(57) ABSTRACT A method and structure for a transfer process for an acoustic resonator
device. In an example, a bulk acoustic wave resonator (BAWR) with an air reflection cavity is …