From the bottom-up: toward area-selective atomic layer deposition with high selectivity
AJM Mackus, MJM Merkx, WMM Kessels - Chemistry of Materials, 2018 - ACS Publications
Bottom-up nanofabrication by area-selective atomic layer deposition (ALD) is currently
gaining momentum in semiconductor processing, because of the increasing need for …
gaining momentum in semiconductor processing, because of the increasing need for …
Self-assembled monolayers of alkanethiols on Au (111): surface structures, defects and dynamics
The surface structures, defects and dynamics of self-assembled monolayers (SAMs) on Au
(111) are reviewed. In the case of the well-known c (4× 2) and√ 3×√ 3 R30° surface …
(111) are reviewed. In the case of the well-known c (4× 2) and√ 3×√ 3 R30° surface …
Area-selective atomic layer deposition of TiN using aromatic inhibitor molecules for metal/dielectric selectivity
MJM Merkx, S Vlaanderen, T Faraz… - Chemistry of …, 2020 - ACS Publications
Despite the rapid increase in the number of newly developed processes, area-selective
atomic layer deposition (ALD) of nitrides is largely unexplored. ALD of nitrides at low …
atomic layer deposition (ALD) of nitrides is largely unexplored. ALD of nitrides at low …
Effect of the phase states of self-assembled monolayers on pentacene growth and thin-film transistor characteristics
To investigate the effects of the phase state (ordered or disordered) of self-assembled
monolayers (SAMs) on the growth mode of pentacene films and the performance of organic …
monolayers (SAMs) on the growth mode of pentacene films and the performance of organic …
Mechanism of Precursor Blocking by Acetylacetone Inhibitor Molecules during Area-Selective Atomic Layer Deposition of SiO2
MJM Merkx, TE Sandoval, DM Hausmann… - Chemistry of …, 2020 - ACS Publications
Area-selective atomic layer deposition (ALD) is currently attracting significant interest as a
solution to the current challenges in alignment that limit the development of sub-5 nm …
solution to the current challenges in alignment that limit the development of sub-5 nm …
Thermal stability of thiol and silane monolayers: A comparative study
The stability of self-assembled monolayers (SAMs) at elevated temperatures is of
considerable technological importance. The thermal stability of 1-octadecanethiol (ODT), 16 …
considerable technological importance. The thermal stability of 1-octadecanethiol (ODT), 16 …
Sequential Regeneration of Self‐Assembled Monolayers for Highly Selective Atomic Layer Deposition
Next generation 3D electronic devices will require novel processing methods. Area selective
atomic layer deposition (ALD) of robust films has the opportunity to play an important role in …
atomic layer deposition (ALD) of robust films has the opportunity to play an important role in …
Mixed monolayers of spiropyrans maximize tunneling conductance switching by photoisomerization at the molecule–electrode interface in EGaIn junctions
This paper describes the photoinduced switching of conductance in tunneling junctions
comprising self-assembled monolayers of a spiropyran moiety using eutectic Ga–In top …
comprising self-assembled monolayers of a spiropyran moiety using eutectic Ga–In top …
Dielectric Surface-Controlled Low-Voltage Organic Transistors via n-Alkyl Phosphonic Acid Self-Assembled Monolayers on High-k Metal Oxide
BO Acton, GG Ting, PJ Shamberger… - … applied materials & …, 2010 - ACS Publications
In this paper, we report on n-alkyl phosphonic acid (PA) self-assembled monolayer
(SAM)/hafnium oxide (HfO2) hybrid dielectrics utilizing the advantages of SAMs for control …
(SAM)/hafnium oxide (HfO2) hybrid dielectrics utilizing the advantages of SAMs for control …
Patterning of self-assembled monolayers of amphiphilic multisegment ligands on nanoparticles and design parameters for protein interactions
Functionalization of nanoparticles with specific ligands is helpful to control specific
diagnostic and therapeutic responses such as protein adsorption, cell targeting, and …
diagnostic and therapeutic responses such as protein adsorption, cell targeting, and …