In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

Exceptional points (EPs) have recently emerged as a new method for engineering the
response of open physical systems, that is, systems that interact with the environment. The …

This paper reports an acceleration sensing method based on two weakly coupled
resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on …

This paper reports a high-sensitivity resonant electrometer based on the mode localization
of two degree-of-freedom weakly coupled resonators (WCRs). When charges are applied to …

This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

The internal resonance of electrostatically coupled cubic nonlinear low-frequency micro-
resonator and linear high-frequency micro-resonator is investigated experimentally. A …

Advances in micro-and nanofabrication technologies have enabled the development of
novel micro-and nanomechanical resonators which have attracted significant attention due …

A proof-of-concept force sensor based on three degree-of-freedom (DoF) weakly coupled
resonators was fabricated using a silicon-on-insulator (SOI) process and electrically tested …

MEMS resonators exhibit rich dynamic behaviors under the internal resonance regime. In
this work, we present a novel MEMS bifurcation sensor that exploits frequency unlocking …