Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …

This paper deals with a control problem of discrete event systems subject to capacity
constraints. Combined use of timed event graphs and Min-Plus algebra is a well-known …

To ensure wafer quality, engineers have to impose wafer residency time constraints and
chamber cleaning operations on cluster tools; this has been widely used in semiconductor …

This paper addresses the control problem of Timed Event Graphs (TEGs) with disturbance
transitions, which are subject to marking constraints. In these graphical models …

This paper proposes analytical approaches to solve the problem of generalised marking
constraints enforced on partially controllable and observable timed event graphs. For this …

This research is devoted to solving the control issue of a class of discrete event systems with
disturbances and subject to Mutual Exclusion Constraints (MECs). More precisely, a new …

This paper discusses the problem of control laws for Discrete Event Dynamic Systems
(DEDSs) represented by Timed Event Graphs (TEGs) under Generalized Marking …

This paper deals with the control problem of partially-observable Discrete Event Systems
(DESs) which are modelled by Networks of Timed Event Graphs (NTEGs) and subject to …

In a cluster tool for semiconductor manufacturing, a wafer waits within a chamber after
processing until it is unloaded by the robot. Such wafer delays degrade wafer quality due to …

The paper focuses on the Generalized Mutual Exclusion Constraints (GMECs) problem in
the Network of Timed Event Graphs (NTEGs). A new formal method for state feedback …