Dynamic Response Considerations in Typical CMOS-MEMS Accelerometer Structures
B Granados-Rojas, MA Reyes-Barranca… - 2020 IEEE Latin …, 2020 - ieeexplore.ieee.org
This work presents important considerations regarding the dynamic response of a CMOS-
MEMS spring-mass-system to step (Heaviside) and ramp (linear input) force stimuli. In the …
MEMS spring-mass-system to step (Heaviside) and ramp (linear input) force stimuli. In the …