Surface-enhanced Raman scattering (SERS) spectroscopy is one of the most prospective
methods combining state-of-the-art nanomaterials and optical techniques for highly sensitive …

Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …

The combination of metal-assisted chemical etching (MACE) with colloidal lithography has
emerged as a simple and cost-effective approach to nanostructure silicon. It is especially …

This review presents a comprehensive synopsis of the recent developments and
achievements in the research of nanosensors composed of plasmonic nanoparticles (NPs) …

Constructing composite structures is the key to breaking the dilemma of slow reaction
kinetics and easy oxidation on the surface of lightly doped p-type silicon nanowire (SiNW) …

Porous materials provide a large surface‐to‐volume ratio, thereby providing a knob to alter
fundamental properties in unprecedented ways. In thermal transport, porous nanomaterials …

Micro/nanoscale structure fabrication is an important process for designing miniaturized
devices. Recently, three-dimensional (3D) integrated circuits using SiO2 via-holes interlayer …

Producing densely packed high aspect ratio In0. 53Ga0. 47As nanostructures without
surface damage is critical for beyond Si-CMOS nanoelectronic and optoelectronic devices …

High-aspect-ratio silicon micro-and nanostructures are technologically relevant in several
applications, such as microelectronics, microelectromechanical systems, sensors …

Methods for the mass fabrication of 3D silicon (Si) microstructures with a 100 nm resolution
are developed using scanning probe lithography (SPL) combined with metal‐assisted …