This paper presents the development of a new compact three-axis compliant stage
employing piezoelectric actuators and a new flexure structure. A proposed stage works out …

This paper describes the conceptual design of an ultraprecision 3-DOF (Z, Ox, Oy) vertical
positioning system with nanometer precision. The vertical out-of-plane positioning system …

Piezo-electric actuators (PEAs) have been widely used in nanopositioning applications due
to their high stiffness, fast responses, and large actuating forces. However, the existence of …

A XY compliant mechanism is designed for the precision application with higher range,
precision and accuracy. In earlier work many researchers have used different methods to …

Planer XY Flexurel Mechanisms has various applications in precision motion mechanisms.
A flexural mechanism generates relative motion between fixed support and motion stage …

Conventional mechanical components (eg rigid components that utilize gears, links joint,
chains, and so on.) has confined repeatability and determination because of specific effects …

Scanning probe microscopy (SPM) allows surface topography imaging with the highest
resolution, as a result of accurate actuation combined with the sharpness of tips. The …

A novel piezoelectric driven compliant stage and its associated PC-based X–Y axes control
schemes have been developed as a potential carrier of automatic optical inspection (AOI) …

Piezoelectric stack actuators are the actuator of choice for many ultra-high precision systems
owning to its fast responses and high pushing force capabilities. These actuators are …

This paper addresses a piezoelectric-actuated compliant mechanism with two output ports to
provide tensile and compressive forces along with high dynamic motions for static tension …