Micromachined silicon platforms, owing to some of its inherent advantages including
miniaturized dimensions, ultralow power consumption, reduced batch fabrication cost, long …

Microelectromechanical systems (MEMS)-based sample carriers became a breakthrough for
in situ inspection techniques, especially in transmission electron microscopy where the …

This paper is concerned with the design, fabrication, and characterization of novel high-
temperature silicon on insulator (SOI) microhotplates employing tungsten resistive heaters …

Liquid phase transmission electron microscopy has become a powerful tool for imaging the
structure and dynamics of materials in solution. Direct observation of material formation …

We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-
SiNWs) for high-performance hydrogen (H2) gas sensing with low power consumption and …

In this work we present our advanced in situ heating sample carrier for transmission electron
microscopy (TEM). The TEM is a powerful tool for materials characterization, especially …

This paper presents a fabrication process for high-temperature MEMS microhotplates that
uses sputtered molybdenum as a conductive material. Molybdenum has a high melting point …

The article presents the design, fabrication and characterization of platinum thin-film
Resistance Temperature Detectors (RTDs) for heat flux sensing applications. The …

Micro‐hotplate structures are increasingly being investigated for use in a host of applications
ranging from broadband infra‐red sources within absorption‐based gas sensors to in situ …

A thin film gold/titanium (Au/Ti) microheater is developed for microthruster ignition, micro
explosive boiling, and micro sensor applications. The microheater was fabricated onto a …