A micrometer sized multi-directional thermal actuator capable of repeatable and rapid
displacement in a substantially horizontal direction, a substantially vertical direction, and/or …

US7675665B2 - Methods and apparatus for actuating displays - Google Patents US7675665B2
- Methods and apparatus for actuating displays - Google Patents Methods and apparatus for …

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A wavelength selective cross-connect switch for selectively switching wavelength-separated
input channels between two optical input signals. The cross-connect switch includes two …

(57) ABSTRACT A modular three-dimensional (3D) optical sWitch that is scalable and that
provides monitor and control of MEMS mirror arrays. A? rst sWitch module includes an array …

This invention relates to methods of manufacturing fluid filled MEMS displays, where the
fluid is sealed in the display assembly and Substantially Surrounds the moving compo nents …

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US9229222B2 - Alignment methods in fluid-filled MEMS displays - Google Patents
US9229222B2 - Alignment methods in fluid-filled MEMS displays - Google Patents Alignment …

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A microelectricalmechanical system (MEMS) digital isolator may be created in which an
actuator such as an electrostatic motor drives a beam against a predefined force set, for …