A scanning electron microscope (SEM) provides real-time imaging with nanometer
resolution and a large scanning area, which enables the development and integration of …

This paper deals with a historical overview of the activities of the French FEMTO-ST institute
in the field of microrobotic manipulation and assembly. It firstly shows tools developed for …

At the microscale, small inertia and high dynamics of microparts increase the complexity of
gras**, releasing, and positioning tasks. The difficulty increases especially because the …

Many tasks related to the micro/nanoworld require, not only high performances like
submicrometric accuracy, but also a high dexterity. Such performances are only obtained …

This paper deals with the design, fabrication and characterization of a tool changer for
micromanipulation cells. This tool changer is part of a manipulation cell including a three …

This paper studies the fabrication of hybrid mi-crocomponents through automated robotic
microassembly. The robotic station used for the microassembly is presented in this paper …

Micromanipulation is a key task to perform serial assembly of MEMS. The two-fingered
microgrippers are usable but require specific studies to be able to work in the microworld. In …

Purpose–This paper aims to deal with the measurement of positioning accuracies of
microscale components assembled to fabricate micro-optical benches (MOB) …

This paper presents the characterization, modeling and precise control of a 2-dof
piezoactuator dedicated to precise and automated micropositioning tasks. The piezoactuator …

This work presents a stable vision based haptic feedback for micromanipulation using both
an asynchronous Address Event Representation (AER) silicon retina and a conventional …