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Solidly-mounted transversely-excited film bulk acoustic resonator
V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2020 - Google Patents
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having parallel front and …
device includes a substrate and a single-crystal piezoelectric plate having parallel front and …
Transversely excited film bulk acoustic resonator using rotated YX cut lithium niobate
Acoustic resonator devices, filters, and methods are dis closed. An acoustic resonator
includes a substrate and a lithium niobate (LN) plate having front and back surfaces. The …
includes a substrate and a lithium niobate (LN) plate having front and back surfaces. The …
XBAR resonators with non-rectangular diaphragms
Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An
acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric …
acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric …
High power transversely-excited film bulk acoustic resonators on Z-cut lithium niobate
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a Z-cut lithium niobate piezoelectric plate having parallel …
substrate having a surface and a Z-cut lithium niobate piezoelectric plate having parallel …
Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …
substrate having a surface and a single-crystal piezoelectric plate having front and back …
Transversely-excited film bulk acoustic resonator with half-lambda dielectric layer
V Yantchev - US Patent 10,868,510, 2020 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …
substrate having a surface and a single-crystal piezoelectric plate having front and back …
Transversely-excited film bulk acoustic resonator package and method
Acoustic resonator devices and filters are disclosed. A piezoelectric plate is attached to a
substrate, a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the …
substrate, a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the …
Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
V Yantchev - US Patent 11,264,966, 2022 - Google Patents
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having front and back …
device includes a substrate and a single-crystal piezoelectric plate having front and back …
High power transversely-excited film bulk acoustic resonators on rotated Z-cut lithium niobate
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a rotated Z-cut lithium niobate piezoelectric plate having …
substrate having a surface and a rotated Z-cut lithium niobate piezoelectric plate having …
Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
Filter devices and methods are disclosed. A filter device includes a substrate having a
surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the …
surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the …