Solidly-mounted transversely-excited film bulk acoustic resonator

V Plesski, S Yandrapalli, RB Hammond… - US Patent …, 2020 - Google Patents
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having parallel front and …

Transversely excited film bulk acoustic resonator using rotated YX cut lithium niobate

V Yantchev, V Plesski, B Garcia - US Patent 10,790,802, 2020 - Google Patents
Acoustic resonator devices, filters, and methods are dis closed. An acoustic resonator
includes a substrate and a lithium niobate (LN) plate having front and back surfaces. The …

XBAR resonators with non-rectangular diaphragms

V Yantchev, P Turner, V Plesski, J Koskela… - US Patent …, 2021 - Google Patents
Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An
acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric …

High power transversely-excited film bulk acoustic resonators on Z-cut lithium niobate

B Garcia, R Hammond, P Turner, N Fenzi… - US Patent …, 2020 - Google Patents
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a Z-cut lithium niobate piezoelectric plate having parallel …

Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer

V Plesski, J John, B Garcia - US Patent 10,985,728, 2021 - Google Patents
Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …

Transversely-excited film bulk acoustic resonator with half-lambda dielectric layer

V Yantchev - US Patent 10,868,510, 2020 - Google Patents
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …

Transversely-excited film bulk acoustic resonator package and method

P Turner, M Eddy, A Kay, V Yantchev… - US Patent …, 2020 - Google Patents
Acoustic resonator devices and filters are disclosed. A piezoelectric plate is attached to a
substrate, a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the …

Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack

V Yantchev - US Patent 11,264,966, 2022 - Google Patents
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having front and back …

High power transversely-excited film bulk acoustic resonators on rotated Z-cut lithium niobate

V Plesski, B Garcia, R Hammond, P Turner… - US Patent …, 2021 - Google Patents
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a
substrate having a surface and a rotated Z-cut lithium niobate piezoelectric plate having …

Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method

V Yantchev, P Turner, RB Hammond - US Patent 11,201,601, 2021 - Google Patents
Filter devices and methods are disclosed. A filter device includes a substrate having a
surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the …