Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Piezoelectric microelectromechanical systems (MEMS) resonators possess favorable
properties, such as strong electromechanical coupling, high, and polarized linear …

Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …

This article discusses the potential of 4H-silicon carbide (SiC) as a superior acoustic
material for microelectromechanical systems (MEMS), particularly for high-performance …

Inertial navigation on a chip has long been constrained by the noise and stability issues of
micromechanical Coriolis gyroscopes, as silicon, the dominant material for …

This paper presents a digital force-to-rebalance (FTR) control system to substantially extend
the bandwidth of high-Q mode-matched high-frequency micro-electro-mechanical systems …

This paper reports on the design and characterization of a low-noise, wide-bandwidth, mode-
matched bulk-acoustic wave (BAW) gyroscope operating in a rotation-rate closed-loop …

In this paper, a modification to the eigenmode operation of resonant gyroscopes is
introduced. The multi-coefficient eigenmode operation can improve cross-mode isolation …

Hexagonal 4H-silicon carbide (4H-SiC) is a transversely isotropic substrate garnering
interest for precision MEMS devices such as resonant gyroscopes. This paper investigates …

A mode-matching and alignment algorithm for bulk acoustic wave (BAW) resonator
gyroscopes via femtosecond laser ablation is presented in this paper and verified on a …