Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
Optimization of extreme ultra-violet light emitted from the CO2 laser-irradiated tin plasmas using 2D radiation hydrodynamic simulations
We studied Extreme Ultra-Violet (EUV) emission characteristics of the 13.5 nm wavelength
from CO_2 laser-irradiated pre-formed tin plasmas using 2D radiation hydrodynamic …
from CO_2 laser-irradiated pre-formed tin plasmas using 2D radiation hydrodynamic …
[HTML][HTML] Strongly anisotropic ion emission in the expansion of Nd: YAG-laser-produced plasma
L Poirier, DJ Hemminga, A Lassise, L Assink… - Physics of …, 2022 - pubs.aip.org
We present results from a combined experimental and numerical simulation study of the
anisotropy of the expansion of a laser-produced plasma into vacuum. Plasma is generated …
anisotropy of the expansion of a laser-produced plasma into vacuum. Plasma is generated …
Mass partitioning in fragmenting tin sheets
We experimentally study the mass partitioning of a fragmenting liquid sheet formed after the
impact of a ns-laser pulse on a tin microdroplet, and its dependence on laser pulse energy …
impact of a ns-laser pulse on a tin microdroplet, and its dependence on laser pulse energy …
[HTML][HTML] Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources
We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by
laser wavelengths in the λ laser= 1.064− 10.6 μ m range and laser intensities of I laser= 0.5 …
laser wavelengths in the λ laser= 1.064− 10.6 μ m range and laser intensities of I laser= 0.5 …
Effects of surface oxide layer on the impact dynamic behavior of molten aluminum droplets
Oxide layer is easily formed on the surface of some metal droplets, which affects the
dynamic behavior of droplet impact. In this paper, experiments were conducted for the …
dynamic behavior of droplet impact. In this paper, experiments were conducted for the …
[HTML][HTML] Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma
We demonstrate the efficient generation of extreme ultraviolet (EUV) light from laser-
produced plasma (LPP) driven by 2 μm wavelength laser light as an alternative for 10 μm …
produced plasma (LPP) driven by 2 μm wavelength laser light as an alternative for 10 μm …
[HTML][HTML] The transition from short-to long-timescale pre-pulses: Laser-pulse impact on tin microdroplets
We experimentally study the interaction of intense laser pulses with metallic microdroplets
and the resulting deformation. Two main droplet deformation regimes have previously been …
and the resulting deformation. Two main droplet deformation regimes have previously been …
Speed of fragments ejected by an expanding liquid tin sheet
We experimentally investigate the speed of fragments produced by ligament breakup in the
laser-induced deformation of tin microdroplets into axisymmetric sheets. The experiments …
laser-induced deformation of tin microdroplets into axisymmetric sheets. The experiments …
Pulse electromagnetic flow of Jeffrey fluid in parallel plate microchannels
D Li, K Li, H Li - Physica Scripta, 2023 - iopscience.iop.org
This paper investigates the pulse electromagnetic flow of a Jeffery fluid between parallel
plate microchannels, where the pulse is considered as a relatively stable and common …
plate microchannels, where the pulse is considered as a relatively stable and common …