Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …

Over the last decade, optical fiber-based forms of microscopy and endoscopy have
extended the realm of applicability for many imaging modalities. Optical fiber-based imaging …

A high speed focus control microelectromechanical systems (MEMS) mirror with a step
response time of 100 μsec and small-displacement bandwidth of 25 kHz is reported for a 3 …

A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel
actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic …

The stacked array piezoelectric deformable mirror (DM) used in adaptive optics (AO)
systems usually has actuator-corresponding high-frequency temperature-induced distortion …

Micromirrors with variable focal length are critical components of various optical systems.
However, due to the limitations of microfabrication and actuation mechanisms, it is very …

A MEMS deformable mirror is described that uses a novel actuation scheme to increase the
optical focus range. In this method electrostatic-pneumatic actuation is used to achieve a …

The “MEMS-in-the-lens” active lens for a laser scanning microscope comprises a high
numerical aperture front element, a 3D+ MOEMS beam scanner and a collimating back lens …

MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-
pneumatic actuation of the mirrors offers relatively large membrane stroke to increase focus …

We developed a novel large-stroke deformable mirror for focus control and spherical
aberration correction. The mirrors fabricated using MEMS technology provide full range (150 …