The piezoelectric actuators are widely used to realize high precise motion with fractional
force and torque in both linear and rotary joints of the micro-systems. The control system …

Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …

Position sensors with nanometer resolution are a key component of many precision imaging
and fabrication machines. Since the sensor characteristics can define the linearity …

This paper presents a comprehensive review of mechanical design and synthesis methods
for piezo-actuated compliant micro-positioning stages, which play an important role in areas …

Piezoelectric actuators (PEAs) have been widely used in nanotechnology due to their
characteristics of fast response, large mass ratio, and high stiffness. However, hysteresis …

Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

This paper presents a modified Prandtl-Ishlinskii (PI)(MPI) model for the asymmetric
hysteresis description and compensation of piezoelectric actuators. Considering the fact that …

Control can enable high-bandwidth nanopositioning needed to increase the operating
speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact …

This paper proposes an improved sliding mode control with perturbation estimation
(SMCPE) featuring a PID-type sliding surface and adaptive gains for the motion tracking …

Manufacturing equipment and scientific instruments, including wafer scanners, printers,
microscopes, and medical imaging scanners, require accurate and fast motions. An increase …