Deadlocks are a rather undesirable situation in a highly automated flexible manufacturing
system. Their occurrences often deteriorate the utilization of resources and may lead to …

Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

An automated warehouse system contains a number of materials, workstations, and multiple
Automated Guided Vehicles (AGVs). The automated warehouse is server-controlled. This …

Discrete-event dynamic systems (DEDs) permeate our world, being of great importance in
modern manufacturing processes, transportation and various forms of computer and …

Automated guided vehicles (AGVs) are an unmanned transport system used for the
horizontal movement of materials. The dispatching and routing problem (DRP) for AGV …

Because of residency time constraints and activity time variation of cluster tools, it is very
difficult to operate such integrated semiconductor manufacturing equipment. This paper …

This paper presents a dynamic routing method for supervisory control of multiple automated
guided vehicles (AGVs) that are traveling within a layout of a given warehouse. In dynamic …

With wafer residency time constraints for some wafer fabrication processes, such as low
pressure chemical-vapor deposition, the schedulability and scheduling problems are still …

There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap
strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer …

This paper develops a two-stage approach to synthesizing liveness-enforcing supervisors
for flexible manufacturing systems (FMS) that can be modeled by a class of Petri nets. First …