Precise and smooth structure on InP fabricated by femtosecond laser direct writing-assisted wet etching

J Zhu, Q Li, Q Chen, B Liu, Z Wei - Optics & Laser Technology, 2024 - Elsevier
We report a method for preparing high-precision microstructures based on near-infrared
femtosecond laser direct writing-assisted wet etching on InP without mask. The relationship …