Atomic layer deposition of ZnO: a review

T Tynell, M Karppinen - Semiconductor Science and Technology, 2014 - iopscience.iop.org
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more
and more interest in the last 20 years as a potential material for applications such as thin-film …

Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges

V Zardetto, BL Williams, A Perrotta… - Sustainable Energy & …, 2017 - pubs.rsc.org
Atomic layer deposition is widely acknowledged as a powerful technique for the deposition
of high quality layers for several applications including photovoltaics (PV). The capability of …

Technology and applications of micro-LEDs: their characteristics, fabrication, advancement, and challenges

TY Lee, LY Chen, YY Lo, SS Swayamprabha… - Acs …, 2022 - ACS Publications
Micro-light-emitting diodes (μLEDs) are getting much attention in display industry because of
their outstanding optical and electrical characteristics. μLEDs have several advantages over …

Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

AJM Mackus, JR Schneider, C MacIsaac… - Chemistry of …, 2018 - ACS Publications
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …

Tunable infrared absorption and visible transparency of colloidal aluminum-doped zinc oxide nanocrystals

R Buonsanti, A Llordes, S Aloni, BA Helms… - Nano …, 2011 - ACS Publications
Plasmonic nanocrystals have been attracting a lot of attention both for fundamental studies
and different applications, from sensing to imaging and optoelectronic devices. Transparent …

Chemistry of doped colloidal nanocrystals

R Buonsanti, DJ Milliron - Chemistry of Materials, 2013 - ACS Publications
Synthetic control over inorganic nanocrystals has made dramatic strides so that a great
number of binary and a few ternary or more complex compounds can now be prepared with …

Antisolvent‐and Annealing‐Free Deposition for Highly Stable Efficient Perovskite Solar Cells via Modified ZnO

Z Wang, X Zhu, J Feng, C Wang, C Zhang… - Advanced …, 2021 - Wiley Online Library
Even though ZnO is commonly used as the ETL in the perovskite solar cell (PSC), the
reactivity of perovskite deposited thereupon limits its performance. Herein, an ethylene …

Progress in perovskite solar cells based on ZnO nanostructures

J Luo, Y Wang, Q Zhang - Solar Energy, 2018 - Elsevier
The rapid development of organometal halide perovskite solar cells (PSCs) has led to
reports of power conversion efficiencies of over 22%. TiO 2 is the most commonly used …

[HTML][HTML] Atomic layer deposition of doped ZnO films

Z Gao, P Banerjee - Journal of Vacuum Science & Technology A, 2019 - pubs.aip.org
This article reviews the process-structure-property relationship in doped ZnO thin films via
atomic layer deposition (ALD). ALD is an important manufacturing-scalable, layer-by-layer …

Investigation of growth characteristics, compositions, and properties of atomic layer deposited amorphous Zn-doped Ga2O3 films

J Tao, HL Lu, Y Gu, HP Ma, X Li, JX Chen, WJ Liu… - Applied Surface …, 2019 - Elsevier
Diethylzinc and H 2 O were used as the precursors for the thermal atomic layer deposition
(TH-ALD) of ZnO deposition while the trimethylgallium and O 2 plasma were used as a …