Method to produce nanometer-sized features with directed assembly of block copolymers
DB Millward, GS Sandhu - US Patent 8,999,492, 2015 - Google Patents
US8999492B2 - Method to produce nanometer-sized features with directed assembly of block
copolymers - Google Patents US8999492B2 - Method to produce nanometer-sized features with …
copolymers - Google Patents US8999492B2 - Method to produce nanometer-sized features with …
Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers
DB Millward - US Patent 8,557,128, 2013 - Google Patents
US8557128B2 - Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic
monolayers - Google Patents US8557128B2 - Sub-10 nm line features via rapid graphoepitaxial …
monolayers - Google Patents US8557128B2 - Sub-10 nm line features via rapid graphoepitaxial …
Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces
DB Millward, D Westmoreland, G Sandhu - US Patent 8,609,221, 2013 - Google Patents
5,925,259 A 7/1999 Biebuycket al. 7,115,995 B2 10/2006 Wong 5.948, 470 A 9, 1999
Harrison et al. 7,118,784 B1 10/2006 **e 5,958,704 A 9, 1999 Starzl et al. 7,119,321 B2 …
Harrison et al. 7,118,784 B1 10/2006 **e 5,958,704 A 9, 1999 Starzl et al. 7,119,321 B2 …
Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method
DB Millward - US Patent 8,372,295, 2013 - Google Patents
Methods for fabricating sublithographic, nanoscale arrays of openings and linear
microchannels utilizing self-assembling block copolymers, and films and devices formed …
microchannels utilizing self-assembling block copolymers, and films and devices formed …
Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference
DB Millward, T Quick - US Patent 8,633,112, 2014 - Google Patents
5,948,470 A 9/1999 Harrison et a1. 7,115,995 B2 10/2006 Wong 5,958,704 A 9/1999
Starzletal. 7,118,784 B1 10/2006 X19 6051869 A 4/2000 Pan etal ' 7,119,321 B2 10/2006 …
Starzletal. 7,118,784 B1 10/2006 X19 6051869 A 4/2000 Pan etal ' 7,119,321 B2 10/2006 …
Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers
DB Millward - US Patent 8,801,894, 2014 - Google Patents
5,891.356 A 4/1999 Inoue et al. 7,090,784 B2 8/2006 Asakawa et al. 5,904.824 A 5, 1999
Oh 7,112,617 B2 9, 2006 Kim et al. 5,925,259 A 7/1999 Biebuycket al. 7,115,305 B2 …
Oh 7,112,617 B2 9, 2006 Kim et al. 5,925,259 A 7/1999 Biebuycket al. 7,115,305 B2 …
Methods of forming an array of openings in a substrate, and related methods of forming a semiconductor device structure
DB Millward - US Patent 9,087,699, 2015 - Google Patents
A method of forming an array of openings in a substrate. The method comprises forming a
template structure comprising a plurality of parallel features and a plurality of additional …
template structure comprising a plurality of parallel features and a plurality of additional …
Semiconductor structures including polymer material permeated with metal oxide
DB Millward, TA Quick, JN Greeley - US Patent 8,669,645, 2014 - Google Patents
Methods of forming metal oxide structures and methods of forming metal oxide patterns on a
substrate using a block copolymer system formulated for self-assembly. A block copolymer …
substrate using a block copolymer system formulated for self-assembly. A block copolymer …
Methods of forming a stamp and a stamp
DB Millward - US Patent 8,956,713, 2015 - Google Patents
5,925,259 A 7/1999 Biebuycket al. 7,115,995 B2 10/2006 Wong 5.948, 470 A 9, 1999
Harrison et al. 7,118,784 B1 10/2006 **e 5,958,704 A 9, 1999 Starzl et al. 7,119,321 B2 …
Harrison et al. 7,118,784 B1 10/2006 **e 5,958,704 A 9, 1999 Starzl et al. 7,119,321 B2 …
Method of synthesis of polyarylenes and the polyarylenes made by such method
JP Godschalx, JP Pechacek, KE Arndt - 2004 - Google Patents
RXJJOELPDDCJNS-UHFFFAOYSA-N c (cc1) ccc1-c1c (ccc (Oc2cc3c (-c4ccccc4)[o] c (-
c4ccccc4) c3cc2) c2) c2c (-c2ccccc2)[o] 1 Chemical compound c (cc1) ccc1-c1c (ccc …
c4ccccc4) c3cc2) c2) c2c (-c2ccccc2)[o] 1 Chemical compound c (cc1) ccc1-c1c (ccc …