Since its introduction in the nineties, the negative resist SU‐8 has been increasingly used in
micro‐and nanotechnologies. SU‐8 has made the fabrication of high‐aspect ratio structures …

In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with
piezoresistive readout combined with the advances in molecular recognition techniques …

The thermal and mechanical properties of a new negative photoresist, SU8, were
characterized. The influence of curing conditions, such as baking temperature, baking time …

The development of a SU-8-based microgripper that can operate in physiological ionic
solutions is presented. The electrothermally activated polymer gripper consists of two" hot …

In this paper we describe a new process for fabricating ultra-thick microfluidic devices
utilizing SU-8 50 negative photoresist (PR) by standard UV lithography. Instead of using a …

Integrating origami principles within traditional microfabrication methods can produce shape
morphing microscale metamaterials and 3D systems with complex geometries and …

This book considers both the unique characteristics of biological samples and the
challenges of microscale engineering. Divided into three main sections, it first examines …

This paper summarizes the results of the process optimization for SU-8 films with
thicknesses⩽ 5 µm. The influence of soft-bake conditions, exposure dose and post-exposure …

The fabrication of three-dimensional (3D) microfluidic networks entirely made of SU-8 with
integrated electrodes is reported. The described technology allows the fabrication of …

The biocompatible polymer, SU-8, was used to microfabricate an interferometric pressure
sensor designed for invasive biomedical applications. Tests of the sensor in air and liquid …