Concepts and key technologies of microelectromechanical systems resonators
T Feng, Q Yuan, D Yu, B Wu, H Wang - Micromachines, 2022 - mdpi.com
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …
mechanisms of MEMS resonators are described. By reviewing the existing representative …
Low-power dual mode MEMS resonators with PPB stability over temperature
LC Ortiz, HK Kwon, J Rodriguez, Y Chen… - Journal of …, 2020 - ieeexplore.ieee.org
We demonstrate two novel dual-mode ovenized MEMS resonators, each with an in-chip
device layer micro-oven that utilizes less than 30mW for resonator temperature control over …
device layer micro-oven that utilizes less than 30mW for resonator temperature control over …
A±0.3 ppm oven-controlled MEMS oscillator using structural resistance-based temperature sensing
This paper presents a 77.7-MHz silicon microelectromechanical-systems oven-controlled
oscillator (MEMS OCXO) that uses the structural resistance (R Struc) of the resonator as an …
oscillator (MEMS OCXO) that uses the structural resistance (R Struc) of the resonator as an …
Five low-noise stable oscillators referenced to the same multimode AlN/Si MEMS resonator
We report on the first experimental demonstration of five self-sustaining feedback oscillators
referenced to a single multimode resonator, using piezoelectric aluminum nitride on silicon …
referenced to a single multimode resonator, using piezoelectric aluminum nitride on silicon …
On enhancing the sensitivity of resonant thermometers based on parametric modulation
In this paper, a new approach for enhancing the temperature sensitivity of a resonant MEMS
thermometer, based on parametric modulation, is proposed. By periodically modulating the …
thermometer, based on parametric modulation, is proposed. By periodically modulating the …
An oven-controlled MEMS oscillator (OCMO) with sub 10mw,±1.5 PPB stability over temperature
This work presents a 20.2 MHz, 1.1 Million quality factor silicon MEMS resonator with sub
10mW ovenization power and±1.5 ppb (parts-per-billion) frequency offset over 100° C …
10mW ovenization power and±1.5 ppb (parts-per-billion) frequency offset over 100° C …
Low motional impedance distributed lamé mode resonators for high frequency timing applications
This paper presents a novel high-Q silicon distributed Lamé mode resonator (DLR) for VHF
timing reference applications. The DLR employs the nature of shear wave propagation to …
timing reference applications. The DLR employs the nature of shear wave propagation to …