An extensive review is given of the results from literature on electron beam induced
deposition. Electron beam induced deposition is a complex process, where many and often …

Focused electron-beam-induced (FEB-induced) deposition and etching are versatile, direct-
write nanofabrication schemes that allow for selective deposition or removal of a variety of …

Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer
range. Since the beams can be used to locally alter material at the point where they are …

Focused electron beam induced deposition (FEBID) is a single-step, direct-write
nanofabrication technique capable of writing three-dimensional metal-containing nanoscale …

The creation of functional nanostructures by electron-beam-induced deposition (EBID) is
becoming more widespread. The benefits of the technology include fast'point-and …

Focused electron beam induced deposition (FEBID) is one of the few techniques that
enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of …

Many experiments on the mechanics of nanostructures require the creation of rigid clamps at
specific locations. In this work, electron-beam-induced deposition (EBID) has been used to …

Electron backscatter diffraction (EBSD) and electron probe microanalysis (EPMA)
measurements are combined to characterize an industrial produced dual-phase steel …

The generation of nanostructures with arbitrary shapes and well‐defined chemical
composition is still a challenge and targets the core of the fast‐growing field of …

* A special volume devoted principally to therole of the late Sir Charles Oatley in the
development of the scanning electron microscopeings* It contains historical articles and …