Focused ion beam (FIB) machining promises exciting new possibilities for the study of
quantum materials through precise control over the shape and geometry of single crystals …

The miniaturization of microelectromechanical systems (MEMS) physical sensors is driven
by global connectivity needs and is closely linked to emerging digital technologies and the …

This paper studies a high-precision etching process based on focused ion beam static
trimming of the defective mass of fused silica hemispherical resonators to eliminate …

High-resolution scanning probe microscopy (SPM) is a fundamental and efficient technology
for surface characterization of modern materials at the subnanometre scale. The bottleneck …

We present the fabrication, operation, and CMOS integration of arrays of suspended silicon
nanowires (SiNWs). The functional structures are obtained by a top–down fabrication …

The work presented in this paper concerns the synthesis of silicon (Si) 2D and 3D
nanostructures using the delayed effect, caused by implanted Ga ions, on the dissolution of …

The effect of geometrical asymmetries on the piezoresistive transduction in suspended
double clamped beam nanomechanical resonators is investigated. Tapered silicon nano …

Novel Si-based nanosize mechanical resonator has been top-down fabricated. The shape of
the resonating body has been numerically derived and consists of seven star-polygons that …

Due to the growing demands on the speed and amount of data transmission, more and more
researchers worldwide are looking for a replacement medium for information transmission …

Nanotechnology, as the scientific and technological discipline dealing with the design,
fabrication and application of systems whose dimensions or tolerances are in the domain of …