In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …

This paper systematically investigates the characteristics of different output metrics for a
weakly coupled three degree-of-freedom microelectromechanical systems resonant sensor …

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However,
they cannot meet the high-sensitivity requirement of future high-end markets such as ultra …

This article proposes a force rebalance control scheme based on a mode-localized resonant
accelerometer (ML-RXL), which is applied to address the limited measurement range …

This article presents a mass sensor based on a 3-degree-of-freedom (DoF) mode localized
piezoelectric bulk acoustic wave (BAW) resonator system operating in the contour …

Micro-electro-mechanical (MEM) resonator devices have been widely used to sense small
changes in the properties of the resonator, namely the stiffness and mass of the resonator …

This paper presents a new family of multi-mass coupled resonators that can provide robust
operation and dynamic motion amplification at the same time. The basic resonator block …

Micro/nano resonators are extensively used for sensing. Coupled arrays of such sensors
can enhance functionality, sensitivity, and accuracy. Sensing can be performed using either …

The micro resonator sensor structures fabrication used bulk micromachining processes
which rely on a lithography process to transfer the structure pattern on Silicon-on-Insulator …

Mircoelectromechanical (MEM) resonators have been widely used as sensors and
accelerometers as the resonators' resonant frequencies shift when one of its properties …