The stick-slip piezoelectric actuator with simple driving signal and structure is a very
promising type for achieving the high resolution and large stroke. However, as a typical …

To address the problem of low tracking precision caused by mechanical cross-coupling
between the axes of a two-degree-of-freedom fast steering mirror (FSM), this study …

A novel two-DOF piezo-driven fast steering mirror (PFSM) with high stiffness and good
decoupling characteristic was proposed. This PFSM could realize rotary motions around X …

In this article, we report on a high-bandwidth large-aperture fast steering mirror (FSM)
actuated by piezoelectric actuators (PEAs) for laser beam machining and a control strategy …

Piezoelectric actuation technology has been widely used in various precise‐oriented fields.
Its notable advantages include high resolution, rapid response speed, output force with high …

A novel two-axis piezoelectric tilting mirror (PETM) was proposed for optical assisted
micromanipulation, which avoided the shortcomings of high capacitance, relatively high cost …

Micro-nano manipulation technology has been widely applied in ultra-precision fields such
as micro-nano manufacturing and biomedical engineering. Multi-DOF ultra-precision stage …

This paper reports the design and wide-bandwidth control of a large aperture fast steering
mirror (FSM) with integrated-sensing units. The developed FSM is driven by electromagnetic …

In recent years, researchers have conducted many investigations on load capacity and
structural optimization. However, the backward motion is still not sufficiently investigated …

Backward motion commonly exists in stick–slip piezoelectric actuators, which deteriorates
the comprehensive performances of the actuators and increases the motion nonlinearity. To …