Dissipation analysis methods and Q-enhancement strategies in piezoelectric MEMS laterally vibrating resonators: A review
Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …
electromechanical systems (MEMS) technologies have been extensively studied as such …
Advances in piezoelectric PZT-based RF MEMS components and systems
There is continuing interest in radio frequency (RF) microelectromechanical system (MEMS)
devices due to their ability to offer exceptional RF performance, high linearity and low power …
devices due to their ability to offer exceptional RF performance, high linearity and low power …
A one-step residue-free wet etching process of ceramic PZT for piezoelectric transducers
Lead zirconate titanate (PZT) has wide applications in microelectromechanical systems
(MEMS) due to its large piezoelectric coefficients. However, there exist serious issues during …
(MEMS) due to its large piezoelectric coefficients. However, there exist serious issues during …
Fabrication of surface acoustic wave based wireless NO2 gas sensor
L Rana, R Gupta, R Kshetrimayum, M Tomar… - Surface and Coatings …, 2018 - Elsevier
Surface acoustic wave (SAW) devices provide a convenient platform for the realization of
sensors in the present decade. 99.4 MHz SAW resonator has been fabricated over the ST …
sensors in the present decade. 99.4 MHz SAW resonator has been fabricated over the ST …
Structure, ferroelectric and mechanical performance of polycrystalline gadolinium-doped lead lanthanum zirconate titanate ceramics
SF Mansour, AM Eid, L Abd El-Latif… - 2017 Joint IEEE …, 2017 - ieeexplore.ieee.org
Gadolinium-doped lead lanthanum zirconate titanate (Pb 0.94-x Gd x La 0.06)(Zr 0.52 Ti
0.48) O 3: PLGZT ceramics with x= 0, 2, 4, 6, and 8% have been successfully fabricated …
0.48) O 3: PLGZT ceramics with x= 0, 2, 4, 6, and 8% have been successfully fabricated …
Piezoelectric lateral-extensional mode resonators with reconfigurable electrode and resonance mode-switching behavior enabled by a VO₂ thin-film
TH Liu, X Han, J Pastrana… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
This article presents the first two-port lateral-extensional mode zinc oxide (ZnO) piezoelectric
resonator with a reconfigurable bottom electrode that is enabled by embedding a vanadium …
resonator with a reconfigurable bottom electrode that is enabled by embedding a vanadium …
Investigation of support transducer enabled higher-order radial bulk mode MEMS resonator and low phase noise oscillator
This work reports the successful excitation of a novel bulk acoustic mode whose actuation
and sensing are facilitated by the support transducer topology (STT). The design …
and sensing are facilitated by the support transducer topology (STT). The design …
Piezoelectric-based support transducer design to enable high-performance bulk mode resonators
An innovative topology to realize high-performance bulk mode devices made up of low-
defect material by driving them into resonance using piezoelectric thin-film transduction is …
defect material by driving them into resonance using piezoelectric thin-film transduction is …
Large-signal behavior of ferroelectric micro-electromechanical transducers
CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC)
technology have the unique capability to enable unprecedented integration of stable …
technology have the unique capability to enable unprecedented integration of stable …
Lead zirconate titanate (PZT) for M/NEMS
RG Polcawich, JS Pulskamp - Piezoelectric MEMS Resonators, 2017 - Springer
This section concentrates on the leading ferroelectric material used in thin-film piezoelectric
MEMS: lead zirconate titanate (PbZr x Ti 1− x O 3) or PZT. PZT-based MEMS technology has …
MEMS: lead zirconate titanate (PbZr x Ti 1− x O 3) or PZT. PZT-based MEMS technology has …