Recent advances in focused ion beam nanofabrication for nanostructures and devices: Fundamentals and applications

P Li, S Chen, H Dai, Z Yang, Z Chen, Y Wang, Y Chen… - Nanoscale, 2021 - pubs.rsc.org
The past few decades have witnessed growing research interest in develo** powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …

Black silicon: fabrication methods, properties and solar energy applications

X Liu, PR Coxon, M Peters, B Hoex, JM Cole… - Energy & …, 2014 - pubs.rsc.org
Black silicon (BSi) represents a very active research area in renewable energy materials.
The rise of BSi as a focus of study for its fundamental properties and potentially lucrative …

Ultra-broadband metamaterial absorbers from long to very long infrared regime

Y Zhou, Z Qin, Z Liang, D Meng, H Xu… - Light: Science & …, 2021 - nature.com
Broadband metamaterials absorbers with high absorption, ultrathin thickness and easy
configurations are in great demand for many potential applications. In this paper, we first …

Water harvesting from air: current passive approaches and outlook

X Liu, D Beysens, T Bourouina - ACS Materials Letters, 2022 - ACS Publications
In the context of global water scarcity, water vapor available in air is a non-negligible
supplementary fresh water resource. Current and potential energetically passive procedures …

Recent advances in antireflective surfaces based on nanostructure arrays

J Cai, L Qi - Materials Horizons, 2015 - pubs.rsc.org
Reducing the reflection and improving the transmission or absorption of light from wide
angles of incidence in a broad wavelength range are crucial for enhancing the performance …

Plasma cryogenic etching of silicon: from the early days to today's advanced technologies

R Dussart, T Tillocher, P Lefaucheux… - Journal of Physics D …, 2014 - iopscience.iop.org
The evolution of silicon cryoetching is reported in this topical review, from its very first
introduction by a Japanese team to today's advanced technologies. The main advances in …

[HTML][HTML] Black silicon for near-infrared and ultraviolet photodetection: A review

Z Zhao, Z Zhang, J **g, R Gao, Z Liao, W Zhang… - APL Materials, 2023 - pubs.aip.org
As a typical representative of micro/nano-textured silicon, black silicon has excellent light
absorption properties and is gradually surfacing as a substitute for standard silicon in …

[HTML][HTML] The structural and optical properties of black silicon by inductively coupled plasma reactive ion etching

M Steglich, T Käsebier, M Zilk, T Pertsch… - Journal of Applied …, 2014 - pubs.aip.org
Black Silicon nanostructures are fabricated by Inductively Coupled Plasma Reactive Ion
Etching (ICP-RIE) in a gas mixture of SF 6 and O 2 at non-cryogenic temperatures. The …

Perspectives on black silicon in semiconductor manufacturing: Experimental comparison of plasma etching, MACE, and Fs-laser etching

X Liu, B Radfar, K Chen, OE Setälä… - IEEE Transactions …, 2022 - ieeexplore.ieee.org
In semiconductor manufacturing, black silicon (bSi) has traditionally been considered as a
sign of unsuccessful etching. However, after more careful consideration, many of its …

Photo-thermoelectric conversion using black silicon with enhanced light trap** performance far beyond the band edge absorption

P Cheng, H Wang, B Müller, J Müller… - … Applied Materials & …, 2021 - ACS Publications
During the past years, much research work has been focused on efficiently harvesting solar
energy with black silicon (b-Si). However, semiconductor Si can only utilize solar energy …