Characterization of semiconductor interfaces by second-harmonic generation

G Lüpke - Surface Science Reports, 1999 - Elsevier
In recent years, optical second-harmonic generation has matured into a versatile and
powerful technique for probing the electronic and structural properties of buried solid–solid …

Ultrathin (< 4 nm) SiO2 and Si–O–N gate dielectric layers for silicon microelectronics: Understanding the processing, structure, and physical and electrical limits

ML Green, EP Gusev, R Degraeve… - Journal of Applied …, 2001 - pubs.aip.org
The outstanding properties of SiO2, which include high resistivity, excellent dielectric
strength, a large band gap, a high melting point, and a native, low defect density interface …

Second harmonic generation from graphene and graphitic films

JJ Dean, HM van Driel - Applied Physics Letters, 2009 - pubs.aip.org
Optical second harmonic generation (SHG) of 800 nm, 150 fs fundamental pulses is
observed from exfoliated graphene and multilayer graphitic films mounted on an oxidized …

Intrinsic threshold voltage fluctuations in decanano MOSFETs due to local oxide thickness variations

A Asenov, S Kaya, JH Davies - IEEE Transactions on electron …, 2002 - ieeexplore.ieee.org
Intrinsic threshold voltage fluctuations introduced by local oxide thickness variations (OTVs)
in deep submicrometer (decanano) MOSFETs are studied using three-dimensional (3-D) …

Graphene and few-layer graphite probed by second-harmonic generation: Theory and experiment

JJ Dean, HM van Driel - Physical Review B—Condensed Matter and Materials …, 2010 - APS
We have measured second-harmonic generation (SHG) from graphene and other graphitic
films, from two layers to bulk graphite, at room temperature; all samples are mounted on a …

Characterization and production metrology of thin transistor gate oxide films

AC Diebold, D Venables, Y Chabal, D Muller… - Materials Science in …, 1999 - Elsevier
The thickness of silicon dioxide that is used as the transistor gate dielectric in most
advanced memory and logic applications has decreased below 7 nm. Unfortunately, the …

Frequency-domain interferometric second-harmonic spectroscopy

PT Wilson, Y Jiang, OA Aktsipetrov, ED Mishina… - Optics letters, 1999 - opg.optica.org
We report a new spectroscopic technique to measure simultaneously the intensity and the
phase of second-harmonic (SH) radiation over a broad spectral range without laser tuning …

Optical second harmonic spectroscopy of semiconductor surfaces: advances in microscopic understanding

MC Downer, BS Mendoza… - Surface and Interface …, 2001 - Wiley Online Library
Even‐order non‐linear optical spectroscopy has emerged as an unusually sensitive
technique for non‐invasive analysis of surfaces and buried interfaces of centrosymmetric …

Optical second harmonic generation studies of ultrathin high-k dielectric stacks

V Fomenko, EP Gusev, E Borguet - Journal of Applied Physics, 2005 - pubs.aip.org
We report an investigation of charge transfer in high-k dielectric stacks on Si by second
harmonic generation (SHG). Ultrathin (2–6 nm) films of HfO 2⁠, ZrO 2⁠, and Al 2 O 3 grown …

On the c-Si|a-SiO2 Interface in Hyperthermal Si Oxidation at Room Temperature

U Khalilov, G Pourtois, ACT Van Duin… - The Journal of Physical …, 2012 - ACS Publications
The exact structure and properties of the Si| SiO2 interface are very important in
microelectronics and photovoltaic devices such as metal-oxide-semiconductor field-effect …