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Characterization of semiconductor interfaces by second-harmonic generation
G Lüpke - Surface Science Reports, 1999 - Elsevier
In recent years, optical second-harmonic generation has matured into a versatile and
powerful technique for probing the electronic and structural properties of buried solid–solid …
powerful technique for probing the electronic and structural properties of buried solid–solid …
Ultrathin (< 4 nm) SiO2 and Si–O–N gate dielectric layers for silicon microelectronics: Understanding the processing, structure, and physical and electrical limits
The outstanding properties of SiO2, which include high resistivity, excellent dielectric
strength, a large band gap, a high melting point, and a native, low defect density interface …
strength, a large band gap, a high melting point, and a native, low defect density interface …
Second harmonic generation from graphene and graphitic films
JJ Dean, HM van Driel - Applied Physics Letters, 2009 - pubs.aip.org
Optical second harmonic generation (SHG) of 800 nm, 150 fs fundamental pulses is
observed from exfoliated graphene and multilayer graphitic films mounted on an oxidized …
observed from exfoliated graphene and multilayer graphitic films mounted on an oxidized …
Intrinsic threshold voltage fluctuations in decanano MOSFETs due to local oxide thickness variations
Intrinsic threshold voltage fluctuations introduced by local oxide thickness variations (OTVs)
in deep submicrometer (decanano) MOSFETs are studied using three-dimensional (3-D) …
in deep submicrometer (decanano) MOSFETs are studied using three-dimensional (3-D) …
Graphene and few-layer graphite probed by second-harmonic generation: Theory and experiment
JJ Dean, HM van Driel - Physical Review B—Condensed Matter and Materials …, 2010 - APS
We have measured second-harmonic generation (SHG) from graphene and other graphitic
films, from two layers to bulk graphite, at room temperature; all samples are mounted on a …
films, from two layers to bulk graphite, at room temperature; all samples are mounted on a …
Characterization and production metrology of thin transistor gate oxide films
The thickness of silicon dioxide that is used as the transistor gate dielectric in most
advanced memory and logic applications has decreased below 7 nm. Unfortunately, the …
advanced memory and logic applications has decreased below 7 nm. Unfortunately, the …
Frequency-domain interferometric second-harmonic spectroscopy
PT Wilson, Y Jiang, OA Aktsipetrov, ED Mishina… - Optics letters, 1999 - opg.optica.org
We report a new spectroscopic technique to measure simultaneously the intensity and the
phase of second-harmonic (SH) radiation over a broad spectral range without laser tuning …
phase of second-harmonic (SH) radiation over a broad spectral range without laser tuning …
Optical second harmonic spectroscopy of semiconductor surfaces: advances in microscopic understanding
Even‐order non‐linear optical spectroscopy has emerged as an unusually sensitive
technique for non‐invasive analysis of surfaces and buried interfaces of centrosymmetric …
technique for non‐invasive analysis of surfaces and buried interfaces of centrosymmetric …
Optical second harmonic generation studies of ultrathin high-k dielectric stacks
We report an investigation of charge transfer in high-k dielectric stacks on Si by second
harmonic generation (SHG). Ultrathin (2–6 nm) films of HfO 2, ZrO 2, and Al 2 O 3 grown …
harmonic generation (SHG). Ultrathin (2–6 nm) films of HfO 2, ZrO 2, and Al 2 O 3 grown …
On the c-Si|a-SiO2 Interface in Hyperthermal Si Oxidation at Room Temperature
The exact structure and properties of the Si| SiO2 interface are very important in
microelectronics and photovoltaic devices such as metal-oxide-semiconductor field-effect …
microelectronics and photovoltaic devices such as metal-oxide-semiconductor field-effect …