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Atomic layer deposition of ZnO: a review
T Tynell, M Karppinen - Semiconductor Science and Technology, 2014 - iopscience.iop.org
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more
and more interest in the last 20 years as a potential material for applications such as thin-film …
and more interest in the last 20 years as a potential material for applications such as thin-film …
[HTML][HTML] Atomic layer deposition of doped ZnO films
This article reviews the process-structure-property relationship in doped ZnO thin films via
atomic layer deposition (ALD). ALD is an important manufacturing-scalable, layer-by-layer …
atomic layer deposition (ALD). ALD is an important manufacturing-scalable, layer-by-layer …
Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …
Hybridization of zinc oxide tetrapods for selective gas sensing applications
In this work, the exceptionally improved sensing capability of highly porous three-
dimensional (3-D) hybrid ceramic networks toward reducing gases is demonstrated for the …
dimensional (3-D) hybrid ceramic networks toward reducing gases is demonstrated for the …
Ceramic thin-film composite membranes with tunable subnanometer pores for molecular sieving
Ceramic membranes are a promising alternative to polymeric membranes for selective
separations, given their ability to operate under harsh chemical conditions. However, current …
separations, given their ability to operate under harsh chemical conditions. However, current …
[HTML][HTML] Large-scale high aspect ratio Al-doped ZnO nanopillars arrays as anisotropic metamaterials
High aspect ratio free-standing Al-doped ZnO (AZO) nanopillars and nanotubes were
fabricated using a combination of advanced reactive ion etching and atomic layer deposition …
fabricated using a combination of advanced reactive ion etching and atomic layer deposition …
Synthesis and characterization of Al-doped ZnO and Al/F co-doped ZnO thin films prepared by atomic layer deposition
Abstract Deposition of Al-doped ZnO (AZO) and Al/F co-doped ZnO (FAZO) thin films in an
ALD “batch-type” reactor at temperature of 200° C was presented. AZO films with various Al …
ALD “batch-type” reactor at temperature of 200° C was presented. AZO films with various Al …
Nitrogen-implanted ZnO nanorod arrays for visible light photocatalytic degradation of a pharmaceutical drug acetaminophen
The present study focuses on the effects of nitrogen (N) ion implantation in vertically aligned
ZnO nanorod arrays (NRAs) and the photocatalytic degradation of acetaminophen. The X …
ZnO nanorod arrays (NRAs) and the photocatalytic degradation of acetaminophen. The X …
Highly conductive and flexible transparent hybrid superlattices with gas-barrier properties: Implications in optoelectronics
Transparent electrodes and passivation layers find extensive application in optoelectronic
devices such as light-emitting diodes, solar cell. Integrating transparent conductive and gas …
devices such as light-emitting diodes, solar cell. Integrating transparent conductive and gas …
Influence of ultrathin gahnite anti-reflection coating on the power conversion efficiency of polycrystalline silicon solar cell
G Velu Kaliyannan, SV Palanisamy… - Journal of Materials …, 2020 - Springer
Current research has concentrated on the development of ZnAl 2 O 4 (gahnite) spinel
nanostructure through anti-reflection coating (ARC) material for improved power conversion …
nanostructure through anti-reflection coating (ARC) material for improved power conversion …