Atomic layer deposition of ZnO: a review

T Tynell, M Karppinen - Semiconductor Science and Technology, 2014 - iopscience.iop.org
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more
and more interest in the last 20 years as a potential material for applications such as thin-film …

[HTML][HTML] Atomic layer deposition of doped ZnO films

Z Gao, P Banerjee - Journal of Vacuum Science & Technology A, 2019 - pubs.aip.org
This article reviews the process-structure-property relationship in doped ZnO thin films via
atomic layer deposition (ALD). ALD is an important manufacturing-scalable, layer-by-layer …

Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

AJM Mackus, JR Schneider, C MacIsaac… - Chemistry of …, 2018 - ACS Publications
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …

Hybridization of zinc oxide tetrapods for selective gas sensing applications

O Lupan, V Postica, J Gröttrup… - … Applied Materials & …, 2017 - ACS Publications
In this work, the exceptionally improved sensing capability of highly porous three-
dimensional (3-D) hybrid ceramic networks toward reducing gases is demonstrated for the …

Ceramic thin-film composite membranes with tunable subnanometer pores for molecular sieving

X Zhou, R Shevate, D Huang, T Cao, X Shen… - Nature …, 2023 - nature.com
Ceramic membranes are a promising alternative to polymeric membranes for selective
separations, given their ability to operate under harsh chemical conditions. However, current …

[HTML][HTML] Large-scale high aspect ratio Al-doped ZnO nanopillars arrays as anisotropic metamaterials

E Shkondin, O Takayama, MEA Panah, P Liu… - Optical Materials …, 2017 - opg.optica.org
High aspect ratio free-standing Al-doped ZnO (AZO) nanopillars and nanotubes were
fabricated using a combination of advanced reactive ion etching and atomic layer deposition …

Synthesis and characterization of Al-doped ZnO and Al/F co-doped ZnO thin films prepared by atomic layer deposition

Z Starowicz, A Zięba, J Ostapko, M Wlazło… - Materials Science and …, 2023 - Elsevier
Abstract Deposition of Al-doped ZnO (AZO) and Al/F co-doped ZnO (FAZO) thin films in an
ALD “batch-type” reactor at temperature of 200° C was presented. AZO films with various Al …

Nitrogen-implanted ZnO nanorod arrays for visible light photocatalytic degradation of a pharmaceutical drug acetaminophen

D Ranjith Kumar, KS Ranjith, Y Haldorai… - ACS …, 2019 - ACS Publications
The present study focuses on the effects of nitrogen (N) ion implantation in vertically aligned
ZnO nanorod arrays (NRAs) and the photocatalytic degradation of acetaminophen. The X …

Highly conductive and flexible transparent hybrid superlattices with gas-barrier properties: Implications in optoelectronics

J Park, HG Pham, J Kim, QK Nguyen, S Cho… - Applied Surface …, 2024 - Elsevier
Transparent electrodes and passivation layers find extensive application in optoelectronic
devices such as light-emitting diodes, solar cell. Integrating transparent conductive and gas …

Influence of ultrathin gahnite anti-reflection coating on the power conversion efficiency of polycrystalline silicon solar cell

G Velu Kaliyannan, SV Palanisamy… - Journal of Materials …, 2020 - Springer
Current research has concentrated on the development of ZnAl 2 O 4 (gahnite) spinel
nanostructure through anti-reflection coating (ARC) material for improved power conversion …