Using multilayer structures to enhance the electrical properties of porous silicon for thermal...

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[HTML][HTML] Micromachining porous silicon thin films for thermal sensing applications

P Sharma, S Erfantalab, J Dell, G Parish… - Applied Materials …, 2024 - Elsevier
This work reports a novel CMOS-compatible micromachining process to fabricate large
porous silicon membranes which are electrically isolated from the silicon substrate. The …
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From nano to giant grains: Optimizing Pt thermistors for microbolometers

A Dan, E Antunes, C Yung, N Tomlin, M Stephens… - Applied Materials …, 2024 - Elsevier
Pt is a suitable thermistor for use in microbolometers due to its high melting point, chemical
inertness, and low 1/f noise. This work explores mechanisms of grain growth to fabricate Pt …
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