[HTML][HTML] Diffusion of n-type dopants in germanium

A Chroneos, H Bracht - Applied Physics Reviews, 2014 - pubs.aip.org
Germanium is being actively considered by the semiconductor community as a mainstream
material for nanoelectronic applications. Germanium has advantageous materials …

Trends in semiconductor defect engineering at the nanoscale

EG Seebauer, KW Noh - Materials Science and Engineering: R: Reports, 2010 - Elsevier
Defect engineering involves manipulating the type, concentration, spatial distribution, or
mobility of defects within a crystalline solid. Defect engineering in semiconductors has …

Diffusion and defect reactions between donors, C, and vacancies in Ge. I. Experimental results

S Brotzmann, H Bracht, JL Hansen, AN Larsen… - Physical Review B …, 2008 - APS
The diffusion of self-atoms and n-type dopants such as phosphorus, arsenic, and antimony
in germanium was studied by means of isotopically controlled multilayer structures doped …

Do** of semiconductors by molecular monolayers: monolayer formation, dopant diffusion and applications

L Ye, MP de Jong, T Kudernac, WG van der Wiel… - Materials science in …, 2017 - Elsevier
The continuous miniaturization in the semiconductor industry brings electronic devices with
higher performance at lower cost. The do** of semiconductor materials plays a crucial role …

Interaction of NiSi with dopants for metallic source/drain applications

J Luo, ZJ Qiu, Z Zhang, M Östling… - Journal of Vacuum …, 2010 - pubs.aip.org
This work has a focus on NiSi as a possible metallic contact for aggressively scaled
complementary metal oxide semiconductor devices. As the bulk work function of NiSi lies …

Variation resistant metal-oxide-semiconductor field effect transistor (MOSFET)

A Asenov, G Roy - US Patent 8,994,123, 2015 - Google Patents
H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating
or switching and having potential barriers; Capacitors or resistors having potential barriers …

Drain current variability and MOSFET parameters correlations in planar FDSOI technology

J Mazurier, O Weber, F Andrieu, F Allain… - 2011 International …, 2011 - ieeexplore.ieee.org
We present for the first time an extensive experimental study of the statistical variability of the
drain current (ID) in 6nm thin undoped Silicon-On-Insulator (SOI) MOSFETs. ID variations (σ …

Variation resistant MOSFETs with superior epitaxial properties

AK Kapoor, A Asenov - US Patent 9,012,276, 2015 - Google Patents
6,667,200 B2 12/2003 Sohn et al. 6,812,157 B1 1 1/2004 Gadgil 7,023,068 B1* 4/2006
Hopper et al................. 257/510 7,045.407 B2* 5/2006 Keating et al................. 438,198 …

Effects of carbon pre-silicidation implant into Si substrate on NiSi

J Luo, ZJ Qiu, J Deng, C Zhao, J Li, W Wang… - Microelectronic …, 2014 - Elsevier
In this work, the effects of carbon pre-silicidation implant into Si (1 0 0) substrate on NiSi
were investigated. NiSi films with carbon pre-silicidation implant to different doses were …

[HTML][HTML] Physical mechanism underlying the enhancement effect of carbon in heavily phosphorus-doped Czochralski silicon substrate on phosphorus out-diffusion …

S Li, T Zhao, D Wu, X Liang, H Chen, Q Nie… - Journal of Applied …, 2024 - pubs.aip.org
The effects of carbon in heavily phosphorus-doped Czochralski (HP-Cz) silicon (Si)
substrates, with the concentrations across an order of magnitude from 10 16 to 10 17 cm− 3 …