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[HTML][HTML] Diffusion of n-type dopants in germanium
Germanium is being actively considered by the semiconductor community as a mainstream
material for nanoelectronic applications. Germanium has advantageous materials …
material for nanoelectronic applications. Germanium has advantageous materials …
Trends in semiconductor defect engineering at the nanoscale
EG Seebauer, KW Noh - Materials Science and Engineering: R: Reports, 2010 - Elsevier
Defect engineering involves manipulating the type, concentration, spatial distribution, or
mobility of defects within a crystalline solid. Defect engineering in semiconductors has …
mobility of defects within a crystalline solid. Defect engineering in semiconductors has …
Diffusion and defect reactions between donors, C, and vacancies in Ge. I. Experimental results
The diffusion of self-atoms and n-type dopants such as phosphorus, arsenic, and antimony
in germanium was studied by means of isotopically controlled multilayer structures doped …
in germanium was studied by means of isotopically controlled multilayer structures doped …
Do** of semiconductors by molecular monolayers: monolayer formation, dopant diffusion and applications
The continuous miniaturization in the semiconductor industry brings electronic devices with
higher performance at lower cost. The do** of semiconductor materials plays a crucial role …
higher performance at lower cost. The do** of semiconductor materials plays a crucial role …
Interaction of NiSi with dopants for metallic source/drain applications
This work has a focus on NiSi as a possible metallic contact for aggressively scaled
complementary metal oxide semiconductor devices. As the bulk work function of NiSi lies …
complementary metal oxide semiconductor devices. As the bulk work function of NiSi lies …
Variation resistant metal-oxide-semiconductor field effect transistor (MOSFET)
A Asenov, G Roy - US Patent 8,994,123, 2015 - Google Patents
H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating
or switching and having potential barriers; Capacitors or resistors having potential barriers …
or switching and having potential barriers; Capacitors or resistors having potential barriers …
Drain current variability and MOSFET parameters correlations in planar FDSOI technology
We present for the first time an extensive experimental study of the statistical variability of the
drain current (ID) in 6nm thin undoped Silicon-On-Insulator (SOI) MOSFETs. ID variations (σ …
drain current (ID) in 6nm thin undoped Silicon-On-Insulator (SOI) MOSFETs. ID variations (σ …
Variation resistant MOSFETs with superior epitaxial properties
AK Kapoor, A Asenov - US Patent 9,012,276, 2015 - Google Patents
6,667,200 B2 12/2003 Sohn et al. 6,812,157 B1 1 1/2004 Gadgil 7,023,068 B1* 4/2006
Hopper et al................. 257/510 7,045.407 B2* 5/2006 Keating et al................. 438,198 …
Hopper et al................. 257/510 7,045.407 B2* 5/2006 Keating et al................. 438,198 …
Effects of carbon pre-silicidation implant into Si substrate on NiSi
J Luo, ZJ Qiu, J Deng, C Zhao, J Li, W Wang… - Microelectronic …, 2014 - Elsevier
In this work, the effects of carbon pre-silicidation implant into Si (1 0 0) substrate on NiSi
were investigated. NiSi films with carbon pre-silicidation implant to different doses were …
were investigated. NiSi films with carbon pre-silicidation implant to different doses were …
[HTML][HTML] Physical mechanism underlying the enhancement effect of carbon in heavily phosphorus-doped Czochralski silicon substrate on phosphorus out-diffusion …
S Li, T Zhao, D Wu, X Liang, H Chen, Q Nie… - Journal of Applied …, 2024 - pubs.aip.org
The effects of carbon in heavily phosphorus-doped Czochralski (HP-Cz) silicon (Si)
substrates, with the concentrations across an order of magnitude from 10 16 to 10 17 cm− 3 …
substrates, with the concentrations across an order of magnitude from 10 16 to 10 17 cm− 3 …