[HTML][HTML] Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks
This research aims to replace ball joints of beam-structure electrostatic chucks (BSESC),
which are limited by issues such as structural friction and inconsistent operation, thus …
which are limited by issues such as structural friction and inconsistent operation, thus …
Influence of heat-induced changeable stiffness at the contact interface on the grip** force of a bipolar electrostatic chuck
Recently, there is an increasing demand for flexible electronics such as OLEDs and
wearable devices. As thin objects such as glass, semiconductor wafers, or polymer films are …
wearable devices. As thin objects such as glass, semiconductor wafers, or polymer films are …