Test device for testing a bonding layer between wafer-shaped samples and test process for testing the bonding layer
M Schönleber, B Michelt - US Patent 9,494,409, 2016 - Google Patents
The invention relates to a test device for testing a bonding layer between wafer-shaped
samples and a test process for testing the bonding layer. The test device comprises a …
samples and a test process for testing the bonding layer. The test device comprises a …
Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head
M Schönleber, B Michelt, M Kunkel - US Patent 9,677,871, 2017 - Google Patents
The invention relates to an optical measuring process for acquiring a Surface topography of
a measurement object. To this end, a measuring device with a measuring head in a …
a measurement object. To this end, a measuring device with a measuring head in a …
Photonic lock based high bandwidth photodetector
SL Chen, YC Na - US Patent 10,157,947, 2018 - Google Patents
The technique introduced herein decouples the traditional relationship between bandwidth
and responsivity, thereby providing a more flexible and wider photodetector design space. In …
and responsivity, thereby providing a more flexible and wider photodetector design space. In …
Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object
B Michelt, M Kunkel - US Patent 9,500,471, 2016 - Google Patents
The invention relates to an optical measuring device for acquiring in situ a difference in
distance between a support and an edge region of an object to be measured. The optical …
distance between a support and an edge region of an object to be measured. The optical …
Apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer
M Schönleber - US Patent 9,297,645, 2016 - Google Patents
An apparatus and method for determining a depth of a region having a high aspect ratio that
protrudes into a surface of a semiconductor wafer are provided. The apparatus comprises a …
protrudes into a surface of a semiconductor wafer are provided. The apparatus comprises a …
Photonic lock based high bandwidth photodetector
SL Chen, YC Na - US Patent 9,362,428, 2016 - Google Patents
The technique introduced herein decouples the traditional relationship between bandwidth
and responsivity, thereby providing a more flexible and wider photodetector design space. In …
and responsivity, thereby providing a more flexible and wider photodetector design space. In …
Distance measuring device and method for measuring distances
M Schönleber, S André - US Patent 10,234,265, 2019 - Google Patents
(57) ABSTRACT A device for measuring a distance to an object comprises a beam splitter
for splitting broadband coherent light emitted by a light source in measuring light which is …
for splitting broadband coherent light emitted by a light source in measuring light which is …
Photonic lock based high bandwidth photodetector
SL Chen, YC Na - US Patent 10,388,806, 2019 - Google Patents
The technique introduced herein decouples the traditional relationship between bandwidth
and responsivity, thereby providing a more flexible and wider photodetector design space. In …
and responsivity, thereby providing a more flexible and wider photodetector design space. In …
Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head
M Schönleber, B Michelt, M Kunkel - US Patent 9,982,994, 2018 - Google Patents
The invention relates to an optical measuring process for acquiring a surface topography of
a measurement object. To this end, a measuring device with a measuring head in a …
a measurement object. To this end, a measuring device with a measuring head in a …