Patterning or lithography is at the core of modern science and technology and cuts across all
disciplines. With the emergence of nanotechnology, conventional methods based on …

Large-grain excimer laser-annealed polysilicon TFTs are studied. Due to the large grain size
of the polysilicon film (about 2.5/spl mu/m), we propose a model for the on-current (above …

In this letter, we present experimental data showing that hot-carrier stress in laser annealed
polycrystalline silicon thin-film transistors provokes an anomalous turn-on voltage variation …

Recently, all-solid-state lithium batteries have attracted great attention due to their safe
operation without risk of explosion under high operating voltage. However, integrating all …

Activation annealing of phosphorus (P)-doped Si was performed with a red–greenblue
(RGB) laser to evaluate its potential for the uniform heating of patterned semiconductor …

Spatially resolved laser micro‐annealing (process shown on inside front cover) has been
used to drive an amorphous to nanocrystalline phase transition in Si inverted colloidal …

This letter reports a. new excimer laser annealing (ELA) method to produce large
polycrystalline silicon (poly-Si) lateral grains exceeding 4 μm. A selectively floating …

(57) ABSTRACT A method for producing a semiconductor component, in which a
semiconductor layer is separated from a Substrate by irradiation with laser pulses, the pulse …

Preparation and property optimization of silver (Ag)-embedded fluorine-doped tin oxide
(FTO) films were achieved based on laser etching, sputtering Ag layers, furnace annealing …

Deposited photonics represents a promising avenue for monolithic back-end integration on
CMOS, yet encounters challenges in simultaneously enhancing waveguide loss and …