Advanced motion control for precision mechatronics: Control, identification, and learning of complex systems

T Oomen - IEEJ Journal of Industry Applications, 2018 - jstage.jst.go.jp
Manufacturing equipment and scientific instruments, including wafer scanners, printers,
microscopes, and medical imaging scanners, require accurate and fast motions. An increase …

Data-driven feedforward learning with force ripple compensation for wafer stages: A variable-gain robust approach

F Song, Y Liu, W **, J Tan, W He - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
To meet the increasing demand for denser integrated circuits, feedforward control plays an
important role in the achievement of high servo performance of wafer stages. The …

Batch-to-batch rational feedforward control: from iterative learning to identification approaches, with application to a wafer stage

L Blanken, F Boeren, D Bruijnen… - … /ASME Transactions on …, 2016 - ieeexplore.ieee.org
Feedforward control enables high performance for industrial motion systems that perform
nonrepeating motion tasks. Recently, learning techniques have been proposed that improve …

Frequency-domain ILC approach for repeating and varying tasks: With application to semiconductor bonding equipment

F Boeren, A Bareja, T Kok… - IEEE/ASME Transactions …, 2016 - ieeexplore.ieee.org
Iterative learning control (ILC) enables high performance for exactly repeating tasks in
motion systems. Besides such tasks, many motion systems also exhibit varying tasks. In …

Neural-network-based iterative learning control for multiple tasks

D Zhang, Z Wang, T Masayoshi - IEEE transactions on neural …, 2020 - ieeexplore.ieee.org
Iterative learning control (ILC) can synthesize the feedforward control signal for the trajectory
tracking control of a repetitive task, even when the system has strong nonlinear dynamics …

Sparse iterative learning control with application to a wafer stage: Achieving performance, resource efficiency, and task flexibility

T Oomen, CR Rojas - Mechatronics, 2017 - Elsevier
Trial-varying disturbances are a key concern in Iterative Learning Control (ILC) and may
lead to inefficient and expensive implementations and severe performance deterioration …

Iterative learning control for video-rate atomic force microscopy

N Nikooienejad, M Maroufi… - … /ASME Transactions on …, 2020 - ieeexplore.ieee.org
We present a control scheme for video-rate atomic force microscopy with rosette pattern. The
controller structure involves a feedback internal-model-based controller and a feedforward …

Resource-efficient ILC for LTI/LTV systems through LQ tracking and stable inversion: Enabling large feedforward tasks on a position-dependent printer

J van Zundert, J Bolder, S Koekebakker, T Oomen - Mechatronics, 2016 - Elsevier
Iterative learning control (ILC) enables high performance for systems that execute repeating
tasks. Norm-optimal ILC based on lifted system representations provides an analytic …

Two updating schemes of iterative learning control for networked control systems with random data dropouts

D Shen, C Zhang, Y Xu - Information Sciences, 2017 - Elsevier
The iterative learning control (ILC) problem is addressed in this paper for stochastic linear
systems with random data dropout modeled by a Bernoulli random variable. Both …

Modeling and robust adaptive iterative learning control of a vehicle‐based flexible manipulator with uncertainties

X **ng, J Liu - International Journal of Robust and Nonlinear …, 2019 - Wiley Online Library
In this brief, this paper deals with a robust adaptive iterative learning control (ILC) problem
for a flexible manipulator attached to a moving vehicle with uncertainties. To begin with …