The unique diffractive properties of gratings have made them essential in a wide range of
applications, including spectral analysis, precision measurement, optical data storage, laser …

Chromatic confocal technology is widely used for precise, steady, and efficient displacement
measurement in many industrial fields. It employs the confocal and dispersion principles to …

Measurement of the relative positions of two objects in three dimensions with sub-
nanometer precision is essential to fundamental physics experiments and applications such …

A long-range, high-precision, and compact transverse displacement metrology is of crucial
importance in both industries and scientific researches. However, it is a great challenge to …

A heterodyne grating interferometer (HTGI) able to simultaneously measure the three-axis
translational displacements of ultraprecision motion stages with a subnanometer resolution …

Surface defect detection is essential feedback for quality control in manufacturing processes.
This paper presents a new defect detection method, Surface Normal Gabor Filter (SNGF), to …

Optical coherence tomography (OCT) is a nonintrusive optical imaging method offering
micrometer-scale spatial resolution, enabling the generation of internal structural cross …

Phase measuring deflectometry has been applied for free-form specular surface metrology,
but its measured slope results are sensitive to the depth of sample positioning, which is also …

This paper documents a novel fast method, named the Iterative Minimum Zone Algorithm
(IMZA), for the evaluation of cylindricity deviation on a large number of measurement points …

Nanoscale measurement is an essential task of nanomanufacturing, and measurement
traceability is a fundamental aspect of nanoscale measurement. High-precision nanoscale …