Micro-and nanoelectromechanical systems, including cantilevers and other small scale
structures, have been studied for sensor applications. Accurate sensing of gaseous or …

The merging of silicon microfabrication techniques with surface functionalization
biochemistry offers new exciting opportunities in develo** microscopic biomedical …

We report a single-electrode-based sliding-mode triboelectric nanogenerator (TENG) that
not only can harvest mechanical energy but also is a self-powered displacement vector …

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The intensive investment in optical microelectromechanical systems (MEMS) in the last
decade has led to many successful components that satisfy the requirements of lightwave …

In this article, we review optical MEMS accelerometers with a particular focus on sensing
techniques and interrogation methods. Optical accelerometers find use in various …

We report a self-powered, single-electrode-based triboelectric sensor (SE-TES) array for
detecting object motion inside of a plastic tube. This innovative, cost-effective, simple …

A high-resolution accelerometer with a bulk-micromachined silicon proof mass and an
interferometric position sensor was developed for measuring vibratory accelerations. The …

We report self-powered velocity and trajectory tracking sensor (VTTS) array for detecting
object motion, velocity, acceleration and trajectory based on single-electrode triboelectric …

Grating plays an essential role in various optical systems owing to its unique dispersion
properties. In recent years, there is increasing demand to miniaturize optical systems for a …