Waveguide-coupled nanopillar metal-cavity light-emitting diodes on silicon

V Dolores-Calzadilla, B Romeira, F Pagliano… - Nature …, 2017‏ - nature.com
Nanoscale light sources using metal cavities have been proposed to enable high integration
density, efficient operation at low energy per bit and ultra-fast modulation, which would make …

Indium phosphide photonic integrated circuit transceiver for FMCW LiDAR

BJ Isaac, B Song, S Pinna, LA Coldren… - IEEE Journal of …, 2019‏ - ieeexplore.ieee.org
We present a photonic integrated circuit (PIC) transceiver for frequency modulated
continuous wave (FMCW) LiDAR applications. The transmitter consists of a widely tunable …

A practical approach to reactive ion etching

F Karouta - Journal of Physics D: Applied Physics, 2014‏ - iopscience.iop.org
In this paper, general aspects of the reactive ion etching (RIE) technique will be described,
such as anisotropy, loading effect, lag effect, RIE chemistries and micro-masking, followed …

Two-dimensional optical beam steering with InP-based photonic integrated circuits

W Guo, PRA Binetti, C Althouse… - IEEE Journal of …, 2013‏ - ieeexplore.ieee.org
Two-dimensional optical beam steering using an InP photonic integrated circuit has been
demonstrated. Lateral beam steering controlled by a 1-D phased array has been made …

Shape-tailored whispering gallery microcavity lasers designed by transformation optics

YH Lee, H Park, I Kim, SJ Park, S Rim, BJ Park… - Photonics …, 2023‏ - opg.optica.org
Semiconductor microdisk lasers have great potential as low-threshold, high-speed, and
small-form-factor light sources required for photonic integrated circuits because of their high …

Nanometer-scale vertical-sidewall reactive ion etching of InGaAs for 3-D III-V MOSFETs

X Zhao, JA del Alamo - IEEE Electron Device Letters, 2014‏ - ieeexplore.ieee.org
This letter introduces a novel inductively coupled plasma-reactive ion etching (ICP-RIE)
technique based on a BCl 3/SiCl 4/Ar chemistry for fabricating sub-20 nm diameter InGaAs …

Subdiffraction confinement in all-semiconductor hyperbolic metamaterial resonators

K Feng, G Harden, DL Sivco, AJ Hoffman - Acs Photonics, 2017‏ - ACS Publications
The strong optical anisotropy of hyperbolic metamaterials has enabled remarkable optical
behavior such as negative refraction, enhancement of the photonic density of states …

Integrated InP-InGaAsP tunable coupled ring optical bandpass filters with zero insertion loss

RS Guzzon, EJ Norberg, JS Parker, LA Johansson… - Optics express, 2011‏ - opg.optica.org
Second and third-order monolithically integrated coupled ring bandpass filters are
demonstrated in the InP-InGaAsP material system with active semiconductor optical …

Deep anisotropic LiNbO3 etching with SF6/Ar inductively coupled plasmas

D Jun, J Wei, C Eng Png, S Guangyuan… - Journal of Vacuum …, 2012‏ - pubs.aip.org
A SF 6/Ar inductively coupled plasma (ICP) technique was investigated to improve etching of
proton exchanged LiNbO 3. The influences of He backside cooling, power, and gas flows on …

Indium phosphide photonic integrated circuits for coherent optical links

PRA Binetti, M Lu, EJ Norberg… - IEEE Journal of …, 2011‏ - ieeexplore.ieee.org
We demonstrate photonic circuits monolithically integrated on an InP-based platform for use
in coherent communication links. We describe a technology platform that allows for the …