This paper proposes the use of an electrostatic device to improve the performance of MEMS
piezoelectric harvesters in the presence of manufacturing uncertainties. Different types of …

For measuring the deflections of the microcantilever biosensor, a reflective grating
microcantilevers based on SOI were designed and fabricated, a high precision optical …

For measuring the deflections of the microcantilever biosensor, a reflective grating
microcantilevers based on SOI were designed and fabricated, a high precision optical …

Исследуются резонансные характеристики трехслойных металлических микро-и
нанобалок толщиной от 60 до 180 нм. Колебания балок возбуждаются …

An effective optical read out approach based on fiber reflective is presented to detect bends
of a biomaterial microcantilever. The microcantilever was fabricated on single crystalline SOI …

Исследованы резонансные свойства металлических балок, имеющих толщину от 60 до
180 нм. Резонансные частоты балок экспериментально определялись по резонансным …