Scheduling cluster tools in semiconductor manufacturing: Recent advances and challenges
Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …
controlled process modules. They have been increasingly used for wafer fabrication. This …
Multiagent and bargaining-game-based real-time scheduling for internet of things-enabled flexible job shop
With the rapid advancement and widespread applications of information technology in the
manufacturing shop floor, a huge amount of real-time data is generated, providing a good …
manufacturing shop floor, a huge amount of real-time data is generated, providing a good …
Homomorphic encryption of supervisory control systems using automata
Cyber-physical systems have been highly integrated into many contemporary
infrastructures. As this integration deepens, the importance of protecting these systems from …
infrastructures. As this integration deepens, the importance of protecting these systems from …
Robust deadlock avoidance policy for automated manufacturing system with multiple unreliable resources
J Luo, Z Liu, S Wang, K **ng - IEEE/CAA Journal of Automatica …, 2020 - ieeexplore.ieee.org
This work studies the robust deadlock control of automated manufacturing systems with
multiple unreliable resources. Our goal is to ensure the continuous production of the jobs …
multiple unreliable resources. Our goal is to ensure the continuous production of the jobs …
Robust deadlock avoidance and control of automated manufacturing systems with assembly operations using Petri nets
Deadlock resolution has been an important research topic in the field of automated
manufacturing systems (AMSs). Researchers generally assume that AMS resources never …
manufacturing systems (AMSs). Researchers generally assume that AMS resources never …
Reducing wafer delay time by robot idle time regulation for single-arm cluster tools
Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …
Adaptive deadlock control for a class of Petri nets with unreliable resources
In an automated manufacturing system (AMS), resources are, in general, subject to
unpredictable failures, which invalidate many existing deadlock control strategies. In this …
unpredictable failures, which invalidate many existing deadlock control strategies. In this …
On a maximally permissive deadlock prevention policy for automated manufacturing systems by using resource-oriented Petri nets
HF Chen, NQ Wu, ZW Li, T Qu - ISA transactions, 2019 - Elsevier
It is theoretically and practically significant to synthesize a maximally permissive (optimal)
controller to prevent deadlocks in an automated manufacturing system (AMS). With an AMS …
controller to prevent deadlocks in an automated manufacturing system (AMS). With an AMS …
Scheduling of dual-gripper robotic cells with reinforcement learning
A dual-gripper robotic cell consists of multiple processing machines and one material
handling robot, which can perform an unloading or a loading task one at a time but can hold …
handling robot, which can perform an unloading or a loading task one at a time but can hold …
Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down
Multi-cluster tools are widely used in majority of wafer fabrication processes in
semiconductor industry. Smaller lot production, thinner circuit width in wafers, larger wafer …
semiconductor industry. Smaller lot production, thinner circuit width in wafers, larger wafer …