An insight into optical metrology in manufacturing
Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …
article, we provide an insight into optical measurement technologies for precision …
Measurement error analysis and compensation for optical encoders: A Review
J Zhao, W Ou, N Cai, Z Wu… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
As a high-precision (HP) position sensor, the optical encoder is the core component of
modern electromechanical machines. During measurement, it is inevitably influenced by …
modern electromechanical machines. During measurement, it is inevitably influenced by …
Design and realization of a compact high-precision capacitive absolute angular position sensor based on time grating
H Wang, K Peng, X Liu, Z Yu… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
This article proposes a compact and high precision capacitive absolute angular position
sensor based on time grating. The sensor consists of a stator and a rotor with three …
sensor based on time grating. The sensor consists of a stator and a rotor with three …
A high-precision absolute angular-displacement capacitive sensor using three-stage time-grating in conjunction with a remodulation scheme
Z Yu, K Peng, X Liu, Z Chen… - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
This paper presents a novel absolute angular-displacement capacitive sensor developed by
combining three incremental angular-displacement time-grating capacitive sensors …
combining three incremental angular-displacement time-grating capacitive sensors …
Highly accurate, absolute optical encoder using a hybrid-positioning method
Y Shi, K Ni, X Li, Q Zhou, X Wang - Optics letters, 2019 - opg.optica.org
An absolute optical encoder with nanometric positioning repeatability is introduced and
investigated. The encoder consists of an improved scale grating and a compact two-probe …
investigated. The encoder consists of an improved scale grating and a compact two-probe …
Design, Optimization, and Compensation of a High-Precision Single-Excitation Absolute Capacitance Angular Encoder up to ±4
This paper presents a single-excitation absolute capacitive rotary encoder that is small in
size, lightweight, robust, and highly precise. The encoder consists of two plates: a rotor and …
size, lightweight, robust, and highly precise. The encoder consists of two plates: a rotor and …
High-precision absolute linear encoder based on a standard calibrated scale
This paper presents the full research and development cycle of a high-precision absolute
linear encoder based on a standard calibrated scale. Already available and used in industry …
linear encoder based on a standard calibrated scale. Already available and used in industry …