An insight into optical metrology in manufacturing

Y Shimizu, LC Chen, DW Kim, X Chen… - Measurement …, 2021 - iopscience.iop.org
Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

Measurement error analysis and compensation for optical encoders: A Review

J Zhao, W Ou, N Cai, Z Wu… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
As a high-precision (HP) position sensor, the optical encoder is the core component of
modern electromechanical machines. During measurement, it is inevitably influenced by …

Design and realization of a compact high-precision capacitive absolute angular position sensor based on time grating

H Wang, K Peng, X Liu, Z Yu… - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
This article proposes a compact and high precision capacitive absolute angular position
sensor based on time grating. The sensor consists of a stator and a rotor with three …

A high-precision absolute angular-displacement capacitive sensor using three-stage time-grating in conjunction with a remodulation scheme

Z Yu, K Peng, X Liu, Z Chen… - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
This paper presents a novel absolute angular-displacement capacitive sensor developed by
combining three incremental angular-displacement time-grating capacitive sensors …

Highly accurate, absolute optical encoder using a hybrid-positioning method

Y Shi, K Ni, X Li, Q Zhou, X Wang - Optics letters, 2019 - opg.optica.org
An absolute optical encoder with nanometric positioning repeatability is introduced and
investigated. The encoder consists of an improved scale grating and a compact two-probe …

Design, Optimization, and Compensation of a High-Precision Single-Excitation Absolute Capacitance Angular Encoder up to ±4

B Hou, C Li, Z Gao, Q Wei, B Zhou… - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
This paper presents a single-excitation absolute capacitive rotary encoder that is small in
size, lightweight, robust, and highly precise. The encoder consists of two plates: a rotor and …

High-precision absolute linear encoder based on a standard calibrated scale

OU Lashmanov, AS Vasilev, AV Vasileva, AG Anisimov… - Measurement, 2018 - Elsevier
This paper presents the full research and development cycle of a high-precision absolute
linear encoder based on a standard calibrated scale. Already available and used in industry …