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Plasma diagnostics for the low-pressure plasma polymerization process: A critical review
Since the 1980s, functionalized plasma polymer films have attracted a considerable
attention owing to their promising utilization in a wide range of modern applications. For …
attention owing to their promising utilization in a wide range of modern applications. For …
Organic–inorganic behaviour of HMDSO films plasma-polymerized at atmospheric pressure
R Morent, N De Geyter, S Van Vlierberghe… - Surface and Coatings …, 2009 - Elsevier
Recently, plasma-polymerization at atmospheric pressure has become a promising
technology due to its reduced equipment costs and its possibility of in-line processing. This …
technology due to its reduced equipment costs and its possibility of in-line processing. This …
Investigation of Gas Phase Species and Deposition of SiO2 Films from HMDSO/O2 Plasmas
DS Wavhal, J Zhang, ML Steen… - Plasma Processes and …, 2006 - Wiley Online Library
SiOxCyHz films are deposited by radio frequency plasma enhanced chemical vapor
deposition (PECVD) using a mixture of HMDSO and oxygen as source gases. The gas …
deposition (PECVD) using a mixture of HMDSO and oxygen as source gases. The gas …
Thin films deposition from hexamethyldisiloxane and hexamethyldisilazane under dielectric-barrier discharge (DBD) conditions
K Schmidt-Szalowski, Z Rżanek-Boroch, J Sentek… - Plasmas and …, 2000 - Springer
Hexamethyldisiloxane (HMDSO) and hexamethyldisilazane (HMDSN) were used as
organosilicon reagents for PE-CVD of thin films under filamentary barrier-discharge …
organosilicon reagents for PE-CVD of thin films under filamentary barrier-discharge …
Optical emission spectra of TEOS and HMDSO derived plasmas used for thin film deposition
A Granier, M Vervloet, K Aumaille… - … Sources Science and …, 2003 - iopscience.iop.org
This paper is devoted to the optical emission spectra (OES) of low pressure (1 mTorr–1 Torr)
plasmas created in tetraethoxysilane (TEOS) and hexamethyldisiloxane (HMDSO) used …
plasmas created in tetraethoxysilane (TEOS) and hexamethyldisiloxane (HMDSO) used …
Effect of H2 addition on the preparation of ZrO2 powder from zircon (ZrSiO4) using a plasma torch
C Geng, P Zhao, M Wu, PG Yan, X Gao, J Li… - Ceramics …, 2024 - Elsevier
In this study, the plasma torch is utilized for the preparation of highly pure ZrO 2 from zircon
(ZrSiO 4). The incorporation of H 2 into the discharge gas Ar improves the plasma physical …
(ZrSiO 4). The incorporation of H 2 into the discharge gas Ar improves the plasma physical …
Deposition of SiOx Films from Hexamethyldisiloxane/Oxygen Radiofrequency Glow Discharges: Process Optimization by Plasma Diagnostics
Optical emission and Fourier transform infrared absorption diagnostics have been carried
out in hexamethyldisiloxane/oxygen RF discharges for studying the effects of the feed …
out in hexamethyldisiloxane/oxygen RF discharges for studying the effects of the feed …
Effect of plasma oxidation treatment on production of a SiOx/SiOxCyHz bilayer to protect carbon steel against corrosion
RP Ribeiro, RCC Rangel, FO Fernandes… - Materials …, 2021 - SciELO Brasil
Because of its excellent properties, carbon steel is a material widely used in several sectors.
However, it is easily corroded when exposed to the environment. Seeking to remedy this …
However, it is easily corroded when exposed to the environment. Seeking to remedy this …
[HTML][HTML] Plasma Deposition to Improve Barrier Performance of Biodegradable and Recyclable Substrates Intended for Food Packaging
The extensive application of biodegradable polymers in the food packaging industries was
partially limited due to poor barrier performances. In the present work, we investigated the …
partially limited due to poor barrier performances. In the present work, we investigated the …
Deposition rate and three-dimensional uniformity of RF plasma deposited SiOx films
D Hegemann, H Brunner, C Oehr - Surface and Coatings Technology, 2001 - Elsevier
The variation of power, pressure and O2/HMDSO ratio in an RF plasma was carried out to
examine deposition rates and to optimize SiOx film properties for the coating of polymers …
examine deposition rates and to optimize SiOx film properties for the coating of polymers …