Plasma diagnostics for the low-pressure plasma polymerization process: A critical review

D Thiry, S Konstantinidis, J Cornil, R Snyders - Thin Solid Films, 2016 - Elsevier
Since the 1980s, functionalized plasma polymer films have attracted a considerable
attention owing to their promising utilization in a wide range of modern applications. For …

Organic–inorganic behaviour of HMDSO films plasma-polymerized at atmospheric pressure

R Morent, N De Geyter, S Van Vlierberghe… - Surface and Coatings …, 2009 - Elsevier
Recently, plasma-polymerization at atmospheric pressure has become a promising
technology due to its reduced equipment costs and its possibility of in-line processing. This …

Investigation of Gas Phase Species and Deposition of SiO2 Films from HMDSO/O2 Plasmas

DS Wavhal, J Zhang, ML Steen… - Plasma Processes and …, 2006 - Wiley Online Library
SiOxCyHz films are deposited by radio frequency plasma enhanced chemical vapor
deposition (PECVD) using a mixture of HMDSO and oxygen as source gases. The gas …

Thin films deposition from hexamethyldisiloxane and hexamethyldisilazane under dielectric-barrier discharge (DBD) conditions

K Schmidt-Szalowski, Z Rżanek-Boroch, J Sentek… - Plasmas and …, 2000 - Springer
Hexamethyldisiloxane (HMDSO) and hexamethyldisilazane (HMDSN) were used as
organosilicon reagents for PE-CVD of thin films under filamentary barrier-discharge …

Optical emission spectra of TEOS and HMDSO derived plasmas used for thin film deposition

A Granier, M Vervloet, K Aumaille… - … Sources Science and …, 2003 - iopscience.iop.org
This paper is devoted to the optical emission spectra (OES) of low pressure (1 mTorr–1 Torr)
plasmas created in tetraethoxysilane (TEOS) and hexamethyldisiloxane (HMDSO) used …

Effect of H2 addition on the preparation of ZrO2 powder from zircon (ZrSiO4) using a plasma torch

C Geng, P Zhao, M Wu, PG Yan, X Gao, J Li… - Ceramics …, 2024 - Elsevier
In this study, the plasma torch is utilized for the preparation of highly pure ZrO 2 from zircon
(ZrSiO 4). The incorporation of H 2 into the discharge gas Ar improves the plasma physical …

Deposition of SiOx Films from Hexamethyldisiloxane/Oxygen Radiofrequency Glow Discharges: Process Optimization by Plasma Diagnostics

M Creatore, F Palumbo, R d'Agostino - Plasmas and Polymers, 2002 - Springer
Optical emission and Fourier transform infrared absorption diagnostics have been carried
out in hexamethyldisiloxane/oxygen RF discharges for studying the effects of the feed …

Effect of plasma oxidation treatment on production of a SiOx/SiOxCyHz bilayer to protect carbon steel against corrosion

RP Ribeiro, RCC Rangel, FO Fernandes… - Materials …, 2021 - SciELO Brasil
Because of its excellent properties, carbon steel is a material widely used in several sectors.
However, it is easily corroded when exposed to the environment. Seeking to remedy this …

[HTML][HTML] Plasma Deposition to Improve Barrier Performance of Biodegradable and Recyclable Substrates Intended for Food Packaging

E Vassallo, M Pedroni, M Aloisio, H Chen, G Firpo… - Plasma, 2022 - mdpi.com
The extensive application of biodegradable polymers in the food packaging industries was
partially limited due to poor barrier performances. In the present work, we investigated the …

Deposition rate and three-dimensional uniformity of RF plasma deposited SiOx films

D Hegemann, H Brunner, C Oehr - Surface and Coatings Technology, 2001 - Elsevier
The variation of power, pressure and O2/HMDSO ratio in an RF plasma was carried out to
examine deposition rates and to optimize SiOx film properties for the coating of polymers …